Abstract: A method of manufacturing a surface-modified carbon material is provided that can form a layer of a metal or the like on the surface in a simple manner and with adhesion performance. The surface-modified carbon material is also provided. The method is characterized by heat-treating a carbon substrate together with a carbon member other than the carbon substrate, the carbon substrate embedded in a surface modifying agent comprising a pyrolytic hydrogen halide generating agent and metal particles containing a transition metal. More specifically, a carbon substrate (2) is embedded in powder (3) containing a pyrolytic hydrogen halide generating agent such as ammonium chloride and metal particles containing a transition metal such as stainless steel, and the carbon substrate (2) is heat-treated together with a carbon member other than the carbon substrate, such as a the graphite crucible (6).

Abstract: By inhibiting generation of particles, a carbon material and a method of manufacturing the carbon material are provided that can be used in the field of semiconductor manufacturing or the like, in which low dust emission is considered important. A carbon material having a chromium carbide layer formed on a surface of a carbon substrate. The chromium carbide layer is composed of Cr3C2. The carbon material can be manufactured through a first step of forming a chromium carbide layer containing a chromium carbide other than Cr3C2 on a surface of a carbon substrate, and a second step of heat-treating the carbon substrate under a reducing atmosphere to convert the chromium carbide other than Cr3C2 into Cr3C2.

Abstract: Provided are a graphite material, which has excellent bonding characteristics to semiconductor and efficiently dissipates heat generated from the semiconductor, and a method for manufacturing such material. The graphite material is provided by adding at least two kinds of elements selected from among silicon, zirconium, calcium, titanium, chromium, manganese, iron, cobalt, nickel, calcium, yttrium, niobium, molybdenum, technetium, ruthenium and compounds containing such elements, and by performing heat treatment. The graphite material is characterized in having a thickness of the 112 face of the graphite crystal of 15 nm or more by X-ray diffraction, and an average heat conductivity of 250 W/(m·K) or more in the three directions of the X, Y and Z axes.

Abstract: By inhibiting generation of particles, a carbon material and a method of manufacturing the carbon material are provided that can be used in the field of semiconductor manufacturing or the like, in which low dust emission is considered important. A carbon material having a chromium carbide layer formed on a surface of a carbon substrate. The chromium carbide layer is composed of Cr3C2. The carbon material can be manufactured through a first step of forming a chromium carbide layer containing a chromium carbide other than Cr3C2 on a surface of a carbon substrate, and a second step of heat-treating the carbon substrate under a reducing atmosphere to convert the chromium carbide other than Cr3C2 into Cr3C2.

Abstract: A carbon material, a jig, and a method of manufacturing the carbon material are provided that can prevent dust emission and also improve the temperature resistance under a nitrogen atmosphere. In a carbon material having a carbon substrate and a metal carbide layer formed on a surface of the carbon substrate, the metal carbide layer includes molybdenum carbide and/or iron carbide. The carbon substrate embedded in a surface modifying agent containing a pyrolytic hydrogen halide generating agent and molybdenum particles and/or iron particles is heat-treated together with a carbon member other than the carbon substrate.

Abstract: A carbon material and a method of manufacturing the same are provided that make it possible to form a layer of a metal that is highly reactive with carbon, such as tungsten, on a carbon substrate while at the same time inhibiting an increase in manufacturing cost and a degradation of processing accuracy. The carbon material has a carbon substrate 2, a first layer 12, and a second layer 13. The first layer contains a carbide of a transition metal. The second layer contains a second metal and/or a carbide of the second metal and a carbide of the transition metal, the second metal being at least one metal selected from the group of metals consisting of Group 4 elements, Group 5 elements, and Group 6 elements. The first and second layers are formed on a surface of the carbon substrate in that order.

Abstract: A method of manufacturing a carbon material that can prevent formation of unevenness of a coating film and degradation in adhesivity of the coating film, by inhibiting a carbon substrate from forming a portion in which a metal carbide layer is not formed. The method is characterized by including a first step of causing metal powder to adhere to a carbon substrate by coating the carbon substrate with a slurry containing the metal powder and polyvinyl alcohol as a binder, and a second step of heat-treating the carbon substrate to which the metal powder has adhered in a vessel containing an atmosphere of hydrogen chloride gas.

Abstract: When treated with a halogen gas, a carbon material can inhibit emission of an impurity after the treatment. A method of manufacturing the carbon material is also provided. A carbon material is subjected to an annealing process under a reduced pressure of from 1 to 10000 Pa in a H2 gas atmosphere at 500° C. to 1200° C. The duration of the annealing process is from 1 minute to 20 hours. This makes it possible to control the concentration of the halogen emitted, such as chlorine, to 5 ppb or less.

Abstract: A method of manufacturing a surface-modified carbon material is provided that can form a layer of a metal or the like on the surface in a simple manner and with adhesion performance. The surface-modified carbon material is also provided. The method is characterized by heat-treating a carbon substrate together with a carbon member other than the carbon substrate, the carbon substrate embedded in a surface modifying agent comprising a pyrolytic hydrogen halide generating agent and metal particles containing a transition metal. More specifically, a carbon substrate (2) is embedded in powder (3) containing a pyrolytic hydrogen halide generating agent such as ammonium chloride and metal particles containing a transition metal such as stainless steel, and the carbon substrate (2) is heat-treated together with a carbon member other than the carbon substrate, such as a the graphite crucible (6).

Abstract: To obtain a carbon fiber-reinforced carbon composite material exhibiting excellent thermal conductivity in every direction in the plane containing the X and Y axes. A carbon fiber-carbon composite formed body in which a number of sheet-like dispersions containing pitch-based carbon fibers dispersed therein randomly in the plane containing the X and Y axes are laminated into a carbon fiber laminate, and pyrolytic carbon is deposited on the surfaces of the carbon fibers of the carbon fiber laminate to coat around the carbon fibers, whereby the carbon fiber laminate is filled with the pyrolytic carbon, and a carbon fiber-reinforced carbon composite material obtained using the carbon fiber-carbon composite formed body.

Abstract: Provided are a graphite material, which has excellent bonding characteristics to semiconductor and efficiently dissipates heat generated from the semiconductor, and a method for manufacturing such material. The graphite material is provided by adding at least two kinds of elements selected from among silicon, zirconium, calcium, titanium, chromium, manganese, iron, cobalt, nickel, calcium, yttrium, niobium, molybdenum, technetium, ruthenium and compounds containing such elements, and by performing heat treatment. The graphite material is characterized in having a thickness of the 112 face of the graphite crystal of 15 nm or more by X-ray diffraction, and an average heat conductivity of 250 W/(m·K) or more in the three directions of the X, Y and Z axes.