Patents by Inventor Akram Ditali

Akram Ditali has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8963331
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: February 24, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Tianhong Zhang, Akram Ditali
  • Publication number: 20140232003
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Application
    Filed: April 30, 2014
    Publication date: August 21, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Tianhong Zhang, Akram Ditali
  • Patent number: 8749066
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: June 10, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Tianhong Zhang, Akram Ditali
  • Publication number: 20130001788
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Application
    Filed: September 13, 2012
    Publication date: January 3, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Tianhong Zhang, Akram Ditali
  • Publication number: 20100230819
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Application
    Filed: May 21, 2010
    Publication date: September 16, 2010
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Tianhong Zhang, Akram Ditali
  • Patent number: 7749885
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: July 6, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Tianhong Zhang, Akram Ditali
  • Publication number: 20080142982
    Abstract: Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
    Type: Application
    Filed: December 15, 2006
    Publication date: June 19, 2008
    Inventors: Tianhong Zhang, Akram Ditali
  • Patent number: 7189623
    Abstract: A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed in overlapping relation, with the gate having opposing edges and a center therebetween. At least one of chlorine or fluorine is concentrated in the gate oxide layer within the overlap more proximate at least one of the gate edges than the center. Preferably, the central region is substantially undoped with fluorine and chlorine. The chlorine and/or fluorine can be provided by forming sidewall spacers proximate the opposing lateral edges of the gate, with the sidewall spacers comprising at least one of chlorine or fluorine. The spacers are annealed at a temperature and for a time effective to diffuse the fluorine or chlorine into the gate oxide layer to beneath the gate.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: March 13, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Publication number: 20070020868
    Abstract: A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed in overlapping relation, with the gate having opposing edges and a center therebetween. At least one of chlorine or fluorine is concentrated in the gate oxide layer within the overlap more proximate at least one of the gate edges than the center. Preferably, the central region is substantially undoped with fluorine and chlorine. The chlorine and/or fluorine can be provided by forming sidewall spacers proximate the opposing lateral edges of the gate, with the sidewall spacers comprising at least one of chlorine or fluorine. The spacers are annealed at a temperature and for a time effective to diffuse the fluorine or chlorine into the gate oxide layer to beneath the gate.
    Type: Application
    Filed: September 11, 2006
    Publication date: January 25, 2007
    Inventors: Salman Akram, Akram Ditali
  • Patent number: 7105411
    Abstract: A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed in overlapping relation, with the gate having opposing edges and a center therebetween. At least one of chlorine or fluorine is concentrated in the gate oxide layer within the overlap more proximate at least one of the gate edges than the center. Preferably, the central region is substantially undoped with fluorine and chlorine. The chlorine and/or fluorine can be provided by forming sidewall spacers proximate the opposing lateral edges of the gate, with the sidewall spacers comprising at least one of chlorine or fluorine. The spacers are annealed at a temperature and for a time effective to diffuse the fluorine or chlorine into the gate oxide layer to beneath the gate.
    Type: Grant
    Filed: April 14, 1999
    Date of Patent: September 12, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Publication number: 20060001054
    Abstract: A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed in overlapping relation, with the gate having opposing edges and a center therebetween. At least one of chlorine or fluorine is concentrated in the gate oxide layer within the overlap more proximate at least one of the gate edges than the center. Preferably, the central region is substantially undoped with fluorine and chlorine. The chlorine and/or fluorine can be provided by forming sidewall spacers proximate the opposing lateral edges of the gate, with the sidewall spacers comprising at least one of chlorine or fluorine. The spacers are annealed at a temperature and for a time effective to diffuse the fluorine or chlorine into the gate oxide layer to beneath the gate.
    Type: Application
    Filed: August 31, 2005
    Publication date: January 5, 2006
    Inventors: Salman Akram, Akram Ditali
  • Patent number: 6593196
    Abstract: A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed in overlapping relation, with the gate having opposing edges and a center therebetween. At least one of chlorine or fluorine is concentrated in the gate oxide layer within the overlap more proximate at least one of the gate edges than the center. Preferably, the central region is substantially undoped with fluorine and chlorine. The chlorine and/or fluorine can be provided by forming sidewall spacers proximate the opposing lateral edges of the gate, with the sidewall spacers comprising at least one of chlorine or fluorine. The spacers are annealed at a temperature and for a time effective to diffuse the fluorine or chlorine into the gate oxide layer to beneath the gate.
    Type: Grant
    Filed: April 23, 1999
    Date of Patent: July 15, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Publication number: 20030017689
    Abstract: A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate oxide layer. In another method, a gate and a gate oxide layer are formed in overlapping relation, with the gate having opposing edges and a center therebetween. At least one of chlorine or fluorine is concentrated in the gate oxide layer within the overlap more proximate at least one of the gate edges than the center. Preferably, the central region is substantially undoped with fluorine and chlorine. The chlorine and/or fluorine can be provided by forming sidewall spacers proximate the opposing lateral edges of the gate, with the sidewall spacers comprising at least one of chlorine or fluorine. The spacers are annealed at a temperature and for a time effective to diffuse the fluorine or chlorine into the gate oxide layer to beneath the gate.
    Type: Application
    Filed: April 23, 1999
    Publication date: January 23, 2003
    Inventors: SALMAN AKRAM, AKRAM DITALI
  • Patent number: 6288433
    Abstract: One aspect of the invention provides a transistor including semiconductive material and a transistor gate having gate oxide positioned therebetween. The gate has opposing gate edges and a central region therebetween, and the gate oxide has opposing edges substantially laterally aligned with the opposing gate edges. A source is formed laterally proximate one of the gate edges and a drain is formed laterally proximate the other of the gate edges. At least one of fluorine or chlorine is concentrated in the gate oxide layer between the semiconductive material and the transistor gate more proximate at least one of the gate edges than the central region. Another aspect of the invention provides a transistor comprising semiconductive material and a transistor gate having gate oxide positioned therebetween. The gate has opposing gate edges and a central region therebetween, and the gate oxide has opposing edges substantially laterally aligned with the opposing gate edges.
    Type: Grant
    Filed: August 21, 2000
    Date of Patent: September 11, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Patent number: 5998274
    Abstract: A multiple implant lightly doped drain ("MILDD") field effect transistor is disclosed. The transistor includes a channel, a gate, a dielectric structure that separates the gate from the channel, a source region and a drain region. The drain region has a first drain subregion, a second drain subregion and a third drain subregion. Each drain subregion has a dopant concentration that differs from that of the other two drain subregions. A method of forming the same is also disclosed.
    Type: Grant
    Filed: October 14, 1998
    Date of Patent: December 7, 1999
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Patent number: 5866460
    Abstract: A multiple implant lightly doped drain ("MILDD") field effect transistor is disclosed. The transistor includes a channel, a gate, a dielectric structure that separates the gate from the channel, a source region and a drain region. The drain region has a first drain subregion, a second drain subregion and a third drain subregion. Each drain subregion has a dopant concentration that differs from that of the other two drain subregions. A method of forming the same is also disclosed.
    Type: Grant
    Filed: April 10, 1997
    Date of Patent: February 2, 1999
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Patent number: 5719425
    Abstract: A multiple implant lightly doped drain ("MILDD") field effect transistor is disclosed. The transistor includes a channel, a gate, a dielectric structure that separates the gate from the channel, a source region and a drain region. The drain region has a first drain subregion, a second drain subregion and a third drain subregion. Each drain subregion has a dopant concentration that differs from that of the other two drain subregions. A method of forming the same is also disclosed.
    Type: Grant
    Filed: January 31, 1996
    Date of Patent: February 17, 1998
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Akram Ditali
  • Patent number: 5393683
    Abstract: The present invention includes a method of forming semiconductor oxide layers and, in particular, gate oxide layers, in MOS semiconductor devices formed on silicon substrates. The method includes the steps of forming a first silicon oxide sublayer on the silicon substrate in an atmosphere including primarily oxygen, and forming a second silicon oxide sublayer over the first sublayer in an atmosphere including primarily nitrous oxide (N.sub.2 O). Preferably, the first and second sublayers represent 80 percent and 20 percent, respectively, of the silicon oxide layer.
    Type: Grant
    Filed: May 26, 1992
    Date of Patent: February 28, 1995
    Assignee: Micron Technology, Inc.
    Inventors: Viju K. Mathews, Charles H. Dennison, Pierre Fazan, Roy Maddox, Akram Ditali