Patents by Inventor Alain Bernhard Charles

Alain Bernhard Charles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Assembly comprising a plurality of mask containers, manufacturing system for manufacturing semiconductor devices, and method
    Patent number: 6895294
    Abstract: The present invention relates to a system for the manufacture of semiconductor devices by lithography, and in particular to an assembly of mask containers for use in such a system. The system comprises: a plurality of mask containers adapted to engage with one another such that two or more containers can be carried together as a stack; a plurality of lithography bays; a transport rail system for carrying the containers between different lithography bays. Each lithography bay has a transmitter/receiver unit for communicating lithography data with a tracking device located in each container, allowing for more efficient mask management. The transportation of the containers in stacks results in an improvement in efficiency.
    Type: Grant
    Filed: December 4, 2000
    Date of Patent: May 17, 2005
    Assignees: Freescale Semiconductor, Inc., Infineon Technologies SC300 GmbH & Co. oHG, Infineon Technologies AG
    Inventors: Karl Emerson Mautz, Alain Bernhard Charles, John George Maltabes, Ralf Schuster