Abstract: The acceleration measurement system has a first thermal cell optimized in sensitivity and a second thermal cell optimized in passband, which cells are connected to inputs of a servo-control loop including an amplifier presenting gain that varies as a function of input signal frequency.

Abstract: The thermal accelerometer of the invention comprises an enclosure having disposed therein a central filament powered by alternating electric current of zero mean amplitude and having a frequency lying between first and second resonant modes of vibration of the central filament, the central filament lying between detector filaments adjacent to reaction filaments powered by alternating electric current of zero mean amplitude and having a frequency lying between the first and second resonant modes of vibration of the reaction filaments.

Abstract: The thermal accelerometer of the invention comprises an enclosure having disposed therein a central filament powered by alternating electric current of zero mean amplitude and having a frequency lying between first and second resonant modes of vibration of the central filament, the central filament lying between detector filaments adjacent to reaction filaments powered by alternating electric current of zero mean amplitude and having a frequency lying between the first and second resonant modes of vibration of the reaction filaments.

Abstract: Construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, includes of the following steps: depositing an insulating layer of several microns by electron gun on the sensor tube, then depositing the components of the thermocouple, by the electron gun, through the nickel masks, at a residual pressure lower than 10−6 torr, at a thickness of several thousand Angstroms, annealing of the capillary tube for one hour, then the mounting of a heating element on the capillary tube treated in this manner.

Abstract: The process for the construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, including of the following steps:

Abstract: The sensor (7) for a mass flow meter (1) including a capillary tube (6) for circulation of fluid in parallel with the principal circuit of the fluid circulation. The sensor includes heating mechanisms (20) of the capillary tube (6) and mechanisms for measuring the temperature (22, 23), upstream and downstream from this heating mechanism (20), and separate from the heating mechanism. The mechanisms for measuring the temperature (22, 23) are two resistors manufactured by deposition in an external manner on the sensor tube (6), one of them (22) upstream from the heating mechanism (20), the other (23) downstream from the heating mechanism. The manufacturing process includes stages of deposition by an electron gun, firstly of a layer of zirconia (21) of several microns, on the tube (6) made of stainless steel, then of the sensitive components (27) and the contacts (31, 32) of the measurement resistors (22, 23), made of platinum, and defined by masks of nickel.