Patents by Inventor Alan Abel

Alan Abel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pallet assembly for substrate inspection device and substrate inspection device
    Patent number: 6765203
    Abstract: A substrate holding pallet assembly of the present invention comprises a pallet for holding a substrate on upper face thereof, and a probe laid on said pallet from above so as to hold said substrate between said pallet and said probe. Also, a substrate inspection device of the invention comprises a chamber having an exhauster for exhausting the chamber into a high vacuum state, an electron beam generator for radiating an electron beam to the substrate, and a secondary electron detector for detecting a secondary electron generated from the substrate by radiation of electron beam from the electron beam generator, a pallet for holding the substrate on upper face thereof, and a probe laid on said pallet from above so as to hold said substrate between said pallet and said probe.
    Type: Grant
    Filed: January 31, 2003
    Date of Patent: July 20, 2004
    Assignee: Shimadzu Corporation
    Inventor: Alan Abel