Patents by Inventor Alan D. Stephen

Alan D. Stephen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas
    Patent number: 6794279
    Abstract: A method is provided, the method including forming a gate dielectric layer above a substrate layer and forming a gate conductor layer above the gate dielectric layer. The method also includes forming an inorganic bottom anti-reflective coating layer above the gate conductor layer and treating the inorganic bottom anti-reflective coating layer with an oxidizing treatment during a rapid thermal anneal process.
    Type: Grant
    Filed: May 23, 2000
    Date of Patent: September 21, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Alan D. Stephen, Michael E. Exterkamp, Jonathan Doan