Abstract: A filter and fabrication process for a thin film filter that is based on frustrated total internal reflection and multiple waveguide layers, in which the waveguide modes are resonantly coupled. The physics of the design is related to prism coupling of light into planar waveguides, and waveguide coupling between planar waveguides in close proximity. Embodiments include a filter that acts as a bandpass filter and polarizer, a filter that acts as a bandpass filter, polarizer and angle filter (spatial filter), a filter that is widely tunable, and a filter that is widely tunable in both peak transmission wavelength and width. Methods of fabrication are disclosed, and methods to correct for manufacturing errors in thin film deposition are described. The filter embodiments can also be used in reflection as notch filters in wavelength and angle, for a particular polarization component.

Abstract: Thin film processing systems and methods are provided having a moving deposition sensor capable of translation and/or rotation in a manner that exposes the sensor to thin film deposition environments in a flux region substantially the same as the deposition environments experienced by one or more moveable substrates during a selected deposition period. In one embodiment, a thin film monitoring and control system is provided wherein one or more moveable substrates and a moveable deposition sensor are moved along substantially coincident trajectories in a flux region of a thin film deposition system for a selected deposition period. Systems and methods of the present invention may include SC-cut quartz crystal microbalance sensors capable of excitation of at least two different resonant modes.

Abstract: A filter and fabrication process for a thin film filter that is based on frustrated total internal reflection and multiple waveguide layers, in which the waveguide modes are resonantly coupled. The physics of the design is related to prism coupling of light into planar waveguides, and waveguide coupling between planar waveguides in close proximity. Embodiments include a filter that acts as a bandpass filter and polarizer, a filter that acts as a bandpass filter, polarizer and angle filter (spatial filter), a filter that is widely tunable, and a filter that is widely tunable in both peak transmission wavelength and width. Methods of fabrication are disclosed, and methods to correct for manufacturing errors in thin film deposition are described. The filter embodiments can also be used in reflection as notch filters in wavelength and angle, for a particular polarization component.

Abstract: Thin film processing systems and methods are provided having a moving deposition sensor capable of translation and/or rotation in a manner that exposes the sensor to thin film deposition environments in a flux region substantially the same as the deposition environments experienced by one or more moveable substrates during a selected deposition period. In one embodiment, a thin film monitoring and control system is provided wherein one or more moveable substrates and a moveable deposition sensor are moved along substantially coincident trajectories in a flux region of a thin film deposition system for a selected deposition period. Systems and methods of the present invention may include SC-cut quartz crystal microbalance sensors capable of excitation of at least two different resonant modes.

Abstract: Thin film processing systems and methods are provided having a moving deposition sensor capable of translation and/or rotation in a manner that exposes the sensor to thin film deposition environments in a flux region substantially the same as the deposition environments experienced by one or more moveable substrates during a selected deposition period. In one embodiment, a thin film monitoring and control system is provided wherein one or more moveable substrates and a moveable deposition sensor are moved along substantially coincident trajectories in a flux region of a thin film deposition system for a selected deposition period. Systems and methods of the present invention may include SC-cut quartz crystal microbalance sensors capable of excitation of at least two different resonant modes.

Abstract: A method is disclosed for depositing a substance on a substrate, including the following steps: providing the substrate in a deposition chamber, providing in the chamber a vapor of the substance, providing a buffer gas in the chamber, and directing a light beam at the substrate to control deposition of the substance by causing light induced drift.