Patents by Inventor Alan Emami

Alan Emami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hot wall diffusion furnace and method for operating the furnace
    Patent number: 4886954
    Abstract: A diffusion furnace and method for processing semiconductor wafers standing on edge wherein the furnace has vertically adjacent electrical resistance heating elements wired in parallel and disposed above the wafers. This arrangement enables the heat input to the furnace by the heating elements to be varied. In a preferred embodiment, the heating elements in the upper section of the tube are connected in one circuit and the heating elements in the lower section of the tube are connected in a second circuit and each circuit is controlled in response to the temperature in that section.
    Type: Grant
    Filed: April 15, 1988
    Date of Patent: December 12, 1989
    Assignee: Thermco Systems, Inc.
    Inventors: Chorng-Tao Yu, Michael A. Fisk, Alan Emami