Abstract: Method and apparatus for material analysis in which X-rays generated pursuant to incidence of an electron beam on the material are detected by a detector which generates signals representative of X-ray intensity. A first single analyzer is connected to receive the signals from the detector and to pass to an associated first counter a count signal whenever the signal applied to the first single channel analyzer is representative of an X-ray energy within a relatively narrow range of such energies. A second single channel analyzer is also connected to receive the signals from the detector and to pass to an associated second counter a count signal whenever the signal applied to the second analyzer is representative of an X-ray energy falling within a much broader range of such energies than the first mentioned range. The first and second counters accumulate the count signals applied thereto.