Abstract: Apparatus for transferring wafers between storage magazines and processing trays. The trays are mounted on a generally cylindrical carousel which is rotated about its axis to bring successive ones of the trays into position for loading wafers on to the trays and unloading wafers from the trays. An elevator assembly is mounted within the carousel and is moveable in an axial direction for alignment with different wafer holding positions which are spaced along the trays. The storage magazines are mounted on the elevator assembly, and wafer transfer blades transfer the wafers between the magazines and radially moveable chucks which carry the wafers to and from the wafer holding positions in the trays.

Abstract: A wafer processing system for spin processing photoresist liquid on a silicon wafer and automatically sequencing them through the processor includes a shuttle having upper and lower air bearing slides. The upper slide receives the wafer from a supply magazine and centers it on a rotating chuck and the lower slide of the shuttle receives the wafer from the chuck and allows it to be transferred to a receive track.

Abstract: Apparatus and method for handling articles, such as glass or ceramic plates, commonly referred to as masks, employed in the manufacture of semi-conductor devices. The masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station. The subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm. The transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predtermined operation may be formed thereon. Another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier.

Abstract: Apparatus and method for handling articles, such as glass or ceramic plates, commonly referred to as masks, employed in the manufacture of semi-conductor devices. The masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station. The subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm. The transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predetermined treating operation may be formed thereon. Another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier.

Abstract: Apparatus and method for handling articles, such as silicon and like wafers used in producing electronic devices. Articles are transferred between two predetermined stations on a fluid bearing track structure and may be selectively diverted in sequence into a storage magazine which defines a buffer station so that articles to be handled or treated in adjacent associated apparatus may be maintained in readily available supply to satisfy the needs of the associated apparatus. When such needs may be satisfied by direct transfer of articles into the associated apparatus the storage buffer zone is bypassed. A selectively actuated fluid bearing turntable directs articles into or from the storage magazine as operating conditions require. All handling of articles is automatically effected on fluid bearings and requires no direct manual participation.