Abstract: A method and apparatus are provided for alignment of an electron beam with precisely located areas of a major surface of a member. Marks of predetermined shape are formed of X-ray producing material and are positioned adjacent the major surface of the member which is preferably substantially transparent to the X-rays generated by the marks. An electron beam to be aligned has at least one alignment beam portion of a predetermined cross-sectional shape and preferably corresponds in dimensional accuracy to the alignment accuracy desired. The X-ray emissions are detected by a detector means preferably positioned adjacent the opposite surface of the member. The position of the electron beam is moved relative to the member while continuing said detection until the X-ray emissions detected indicate alignment of the alignment beam portion with a corresponding mark.