Patents by Inventor Alan John Jensen

Alan John Jensen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of optimizing chemical mechanical planarization process
    Patent number: 6315634
    Abstract: A method for determining an optimized set of polishing parameters is disclosed. a wafer is polished using one set of polishing parameters, and a first polishing result can then be determined. The wafer is then polished using a second set of polishing parameters, wherein at least one of the first polishing parameters has been changed, and a second polishing result can be determined. The first and second polishing results can then be analyzed to determine an optimized set of polishing parameters. A second wafer can then be polishing using the optimized set of polishing parameters.
    Type: Grant
    Filed: October 6, 2000
    Date of Patent: November 13, 2001
    Assignee: Lam Research Corporation
    Inventors: Alan John Jensen, Cangshan Xu