Patents by Inventor Alan KUO
Alan KUO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250357393Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity, and a portion of the dielectric layer extends in a direction angled with respect to a top surface of the conductive pad. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity, and the passivation layer contacts the dielectric layer.Type: ApplicationFiled: July 29, 2025Publication date: November 20, 2025Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
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Patent number: 12431447Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.Type: GrantFiled: May 30, 2024Date of Patent: September 30, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Lung Shih, Chao-Keng Li, Alan Kuo, C. C. Chang, Yi-An Lin
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Publication number: 20240321787Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.Type: ApplicationFiled: May 30, 2024Publication date: September 26, 2024Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
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Patent number: 12002771Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.Type: GrantFiled: May 13, 2021Date of Patent: June 4, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Lung Shih, Chao-Keng Li, Alan Kuo, C. C. Chang, Yi-An Lin
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Publication number: 20240079357Abstract: An integrated circuit (IC) device includes a redistribution line over a substrate, wherein a first angle between a topmost surface of the redistribution line and a sidewall of the redistribution line is within a first angle range, a second angle between a bottommost surface of the redistribution line and the sidewall of the redistribution line is within a second angle range, and the second angle range is different from the first angle range. The IC device further includes a passivation layer over the redistribution line, wherein a bottommost surface of the passivation layer is below the bottommost surface of the redistribution line.Type: ApplicationFiled: November 13, 2023Publication date: March 7, 2024Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH
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Patent number: 11817404Abstract: An integrated circuit (IC) device includes a redistribution line over a substrate, wherein an entire sidewall of the redistribution line is curved. The IC device further includes a passivation layer over the redistribution line, wherein a distance from a bottommost surface of the passivation layer to the substrate is less than a distance from a bottommost surface of the redistribution line to the substrate. The IC device further includes a polymer layer over the passivation layer.Type: GrantFiled: August 5, 2021Date of Patent: November 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-An Lin, Alan Kuo, C. C. Chang, Yu-Lung Shih
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Publication number: 20210375802Abstract: An integrated circuit (IC) device includes a redistribution line over a substrate, wherein an entire sidewall of the redistribution line is curved. The IC device further includes a passivation layer over the redistribution line, wherein a distance from a bottommost surface of the passivation layer to the substrate is less than a distance from a bottommost surface of the redistribution line to the substrate. The IC device further includes a polymer layer over the passivation layer.Type: ApplicationFiled: August 5, 2021Publication date: December 2, 2021Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH
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Patent number: 11114395Abstract: An integrated circuit (IC) device includes a first passivation layer over a substrate. The IC device further includes a redistribution line over the first passivation layer, wherein the redistribution line has a barrel-shaped profile. The IC device further includes a second passivation layer over the redistribution line. The IC device further includes a polymer layer over the second passivation layer.Type: GrantFiled: October 21, 2019Date of Patent: September 7, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-An Lin, Alan Kuo, C. C. Chang, Yu-Lung Shih
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Publication number: 20210265292Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.Type: ApplicationFiled: May 13, 2021Publication date: August 26, 2021Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
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Patent number: 11018100Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device includes a dielectric layer over the conductive pad, wherein the dielectric layer comprises silicon oxide. The semiconductor device includes a first passivation layer directly over the dielectric layer, wherein the first passivation layer comprises silicon oxide. The semiconductor device includes a second passivation layer directly over the first passivation layer, wherein the second passivation layer comprises silicon nitride.Type: GrantFiled: May 13, 2019Date of Patent: May 25, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Lung Shih, Chao-Keng Li, Alan Kuo, C. C. Chang, Yi-An Lin
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Publication number: 20200051934Abstract: An integrated circuit (IC) device includes a first passivation layer over a substrate. The IC device further includes a redistribution line over the first passivation layer, wherein the redistribution line has a barrel-shaped profile. The IC device further includes a second passivation layer over the redistribution line. The IC device further includes a polymer layer over the second passivation layer.Type: ApplicationFiled: October 21, 2019Publication date: February 13, 2020Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH
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Patent number: 10453811Abstract: A method of manufacturing a semiconductor structure. The method includes depositing a conductive material over a substrate, and removing a portion of the conductive material to form a conductive structure having a barrel shape. A width of a body portion of the conductive structure is greater than a width of an upper portion and a width of a bottom portion of the conductive structure.Type: GrantFiled: May 1, 2017Date of Patent: October 22, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-An Lin, Alan Kuo, C. C. Chang, Yu-Lung Shih
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Publication number: 20190273056Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device includes a dielectric layer over the conductive pad, wherein the dielectric layer comprises silicon oxide. The semiconductor device includes a first passivation layer directly over the dielectric layer, wherein the first passivation layer comprises silicon oxide. The semiconductor device includes a second passivation layer directly over the first passivation layer, wherein the second passivation layer comprises silicon nitride.Type: ApplicationFiled: May 13, 2019Publication date: September 5, 2019Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
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Patent number: 10290596Abstract: A method of making a semiconductor device includes depositing a dielectric layer over a conductive pad using a first deposition process. The method further includes depositing a first passivation layer directly over the dielectric layer using a high density plasma chemical vapor deposition (HDPCVD). The first deposition process is different from HDPCVD. A thickness of the dielectric layer is sufficient to prevent charges generated by depositing the first passivation layer from reaching the conductive pad.Type: GrantFiled: June 8, 2017Date of Patent: May 14, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Lung Shih, Chao-Keng Li, Alan Kuo, C. C. Chang, Yi-An Lin
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Publication number: 20180166406Abstract: A method of making a semiconductor device includes depositing a dielectric layer over a conductive pad using a first deposition process. The method further includes depositing a first passivation layer directly over the dielectric layer using a high density plasma chemical vapor deposition (HDPCVD). The first deposition process is different from HDPCVD. A thickness of the dielectric layer is sufficient to prevent charges generated by depositing the first passivation layer from reaching the conductive pad.Type: ApplicationFiled: June 8, 2017Publication date: June 14, 2018Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
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Publication number: 20180151520Abstract: A method of manufacturing a semiconductor structure. The method includes depositing a conductive material over a substrate, and removing a portion of the conductive material to form a conductive structure having a barrel shape. A width of a body portion of the conductive structure is greater than a width of an upper portion and a width of a bottom portion of the conductive structure.Type: ApplicationFiled: May 1, 2017Publication date: May 31, 2018Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH