Patents by Inventor Alan KUO

Alan KUO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240079357
    Abstract: An integrated circuit (IC) device includes a redistribution line over a substrate, wherein a first angle between a topmost surface of the redistribution line and a sidewall of the redistribution line is within a first angle range, a second angle between a bottommost surface of the redistribution line and the sidewall of the redistribution line is within a second angle range, and the second angle range is different from the first angle range. The IC device further includes a passivation layer over the redistribution line, wherein a bottommost surface of the passivation layer is below the bottommost surface of the redistribution line.
    Type: Application
    Filed: November 13, 2023
    Publication date: March 7, 2024
    Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH
  • Patent number: 11817404
    Abstract: An integrated circuit (IC) device includes a redistribution line over a substrate, wherein an entire sidewall of the redistribution line is curved. The IC device further includes a passivation layer over the redistribution line, wherein a distance from a bottommost surface of the passivation layer to the substrate is less than a distance from a bottommost surface of the redistribution line to the substrate. The IC device further includes a polymer layer over the passivation layer.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-An Lin, Alan Kuo, C. C. Chang, Yu-Lung Shih
  • Publication number: 20210375802
    Abstract: An integrated circuit (IC) device includes a redistribution line over a substrate, wherein an entire sidewall of the redistribution line is curved. The IC device further includes a passivation layer over the redistribution line, wherein a distance from a bottommost surface of the passivation layer to the substrate is less than a distance from a bottommost surface of the redistribution line to the substrate. The IC device further includes a polymer layer over the passivation layer.
    Type: Application
    Filed: August 5, 2021
    Publication date: December 2, 2021
    Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH
  • Patent number: 11114395
    Abstract: An integrated circuit (IC) device includes a first passivation layer over a substrate. The IC device further includes a redistribution line over the first passivation layer, wherein the redistribution line has a barrel-shaped profile. The IC device further includes a second passivation layer over the redistribution line. The IC device further includes a polymer layer over the second passivation layer.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: September 7, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-An Lin, Alan Kuo, C. C. Chang, Yu-Lung Shih
  • Publication number: 20210265292
    Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.
    Type: Application
    Filed: May 13, 2021
    Publication date: August 26, 2021
    Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
  • Patent number: 11018100
    Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device includes a dielectric layer over the conductive pad, wherein the dielectric layer comprises silicon oxide. The semiconductor device includes a first passivation layer directly over the dielectric layer, wherein the first passivation layer comprises silicon oxide. The semiconductor device includes a second passivation layer directly over the first passivation layer, wherein the second passivation layer comprises silicon nitride.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: May 25, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lung Shih, Chao-Keng Li, Alan Kuo, C. C. Chang, Yi-An Lin
  • Publication number: 20200051934
    Abstract: An integrated circuit (IC) device includes a first passivation layer over a substrate. The IC device further includes a redistribution line over the first passivation layer, wherein the redistribution line has a barrel-shaped profile. The IC device further includes a second passivation layer over the redistribution line. The IC device further includes a polymer layer over the second passivation layer.
    Type: Application
    Filed: October 21, 2019
    Publication date: February 13, 2020
    Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH
  • Patent number: 10453811
    Abstract: A method of manufacturing a semiconductor structure. The method includes depositing a conductive material over a substrate, and removing a portion of the conductive material to form a conductive structure having a barrel shape. A width of a body portion of the conductive structure is greater than a width of an upper portion and a width of a bottom portion of the conductive structure.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: October 22, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-An Lin, Alan Kuo, C. C. Chang, Yu-Lung Shih
  • Publication number: 20190273056
    Abstract: A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device includes a dielectric layer over the conductive pad, wherein the dielectric layer comprises silicon oxide. The semiconductor device includes a first passivation layer directly over the dielectric layer, wherein the first passivation layer comprises silicon oxide. The semiconductor device includes a second passivation layer directly over the first passivation layer, wherein the second passivation layer comprises silicon nitride.
    Type: Application
    Filed: May 13, 2019
    Publication date: September 5, 2019
    Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
  • Patent number: 10290596
    Abstract: A method of making a semiconductor device includes depositing a dielectric layer over a conductive pad using a first deposition process. The method further includes depositing a first passivation layer directly over the dielectric layer using a high density plasma chemical vapor deposition (HDPCVD). The first deposition process is different from HDPCVD. A thickness of the dielectric layer is sufficient to prevent charges generated by depositing the first passivation layer from reaching the conductive pad.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: May 14, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lung Shih, Chao-Keng Li, Alan Kuo, C. C. Chang, Yi-An Lin
  • Publication number: 20180166406
    Abstract: A method of making a semiconductor device includes depositing a dielectric layer over a conductive pad using a first deposition process. The method further includes depositing a first passivation layer directly over the dielectric layer using a high density plasma chemical vapor deposition (HDPCVD). The first deposition process is different from HDPCVD. A thickness of the dielectric layer is sufficient to prevent charges generated by depositing the first passivation layer from reaching the conductive pad.
    Type: Application
    Filed: June 8, 2017
    Publication date: June 14, 2018
    Inventors: Yu-Lung SHIH, Chao-Keng LI, Alan KUO, C. C. CHANG, Yi-An LIN
  • Publication number: 20180151520
    Abstract: A method of manufacturing a semiconductor structure. The method includes depositing a conductive material over a substrate, and removing a portion of the conductive material to form a conductive structure having a barrel shape. A width of a body portion of the conductive structure is greater than a width of an upper portion and a width of a bottom portion of the conductive structure.
    Type: Application
    Filed: May 1, 2017
    Publication date: May 31, 2018
    Inventors: Yi-An LIN, Alan KUO, C. C. CHANG, Yu-Lung SHIH