Patents by Inventor Alan L. Starner

Alan L. Starner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inertial temperature control system and method
    Patent number: 6901317
    Abstract: An inertial temperature control system and method are provided for changing the temperature of a body between two temperatures such that the ending temperature is reached smoothly without substantial temperature overshoot or oscillation. A temperature control algorithm is fed a set point temperature that accelerates and decelerates at a physically attainable rate.
    Type: Grant
    Filed: February 6, 2002
    Date of Patent: May 31, 2005
    Assignee: Aviza Technology, Inc.
    Inventor: Alan L. Starner
  • System and method to control radial delta temperature
    Patent number: 6864466
    Abstract: A system and method of minimizing stress related to the ramp rate of a variable by limiting the ramp rate as a function of the current value of the variable is provided. More specifically, the present invention provides a system and method of maintaining the radial delta temperature of a semiconductor substrate or other heated body below the crystal slip curve by dynamically controlling the temperature ramp rate during processing.
    Type: Grant
    Filed: March 8, 2002
    Date of Patent: March 8, 2005
    Assignee: Aviza Technology, Inc.
    Inventors: Cole Porter, Alan L. Starner
  • System and method to control radial delta temperature
    Publication number: 20030168442
    Abstract: A system and method of minimizing stress related to the ramp rate of a variable by limiting the ramp rate as a function of the current value of the variable is provided. More specifically, the present invention provides a system and method of maintaining the radial delta temperature of a semiconductor substrate or other heated body below the crystal slip curve by dynamically controlling the temperature ramp rate during processing.
    Type: Application
    Filed: March 8, 2002
    Publication date: September 11, 2003
    Inventors: Cole Porter, Alan L. Starner
  • Inertial temperature control system and method
    Publication number: 20020143426
    Abstract: An inertial temperature control system and method are provided for changing the temperature of a body between two temperatures such that the ending temperature is reached smoothly without substantial temperature overshoot or oscillation. A temperature control algorithm is fed a set point temperature that accelerates and decelerates at a physically attainable rate.
    Type: Application
    Filed: February 6, 2002
    Publication date: October 3, 2002
    Applicant: ASML US, INC.
    Inventor: Alan L. Starner
  • Rotating bicycle shoe cleat
    Patent number: 5079968
    Abstract: A rotating bicycle shoe cleat consisting of an outer stationary structure and an inner, rotating structure. The stationary structure has front and rear locking portions which allow rigid engagement to a spring loaded clipless bicycle pedal. The rotary structure is mounted on the sole of a bicycle shoe. The two structures share a common axis of rotation. This common axis allows the rotary structure to pivot within the stationary structure when there is a dynamic lateral rotational force present. The amount of rotation is controlled by suitably located compression pads and limiting embrasures. In addition, the compression pads act as dampers. In all other respects, the rotating bicycle shoe cleat functions as a standard bicycle shoe cleat.
    Type: Grant
    Filed: April 12, 1991
    Date of Patent: January 14, 1992
    Inventor: Alan L. Starner