Abstract: A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and optionally a diffuser for capturing a substantial portion of the gas so that the gas may be recycled in a closed-loop system. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like. A remotely-controlled XYZ micro-positioning stage facilitates alignment of the nozzle and the diffuser to the radiated energy beam.

Abstract: A method and apparatus for forming a detached, compact toroidally shaped spheromak plasma by an inductive mechanism. A generally spheroidal vacuum vessel (1) houses a toroidally shaped flux ring or core (2) which contains poloidal and toroidal field generating coils. A plasma discharge occurs with the pulsing of the toroidal field coil, and the plasma is caused to expand away from the core (2) and toward the center of the vacuum vessel (1). When the plasma is in an expanded state, a portion of it is pinched off in order to form a separate, detached spheromak plasma configuration. The detached plasma is supported by a magnetic field generated by externally arranged equilibrium field coils (5).