Patents by Inventor Alan Olds

Alan Olds has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060021439
    Abstract: Apparatus and method are provided for in-situ measurement of vibrational energy applied to a wafer in a process bath of a vibrational cleaning system. The apparatus may be made up of a test wafer comprising an array of pressure sensing elements disposed thereon for monitoring power level variation of a time-varying pressure wave. The time-varying pressure wave is indicative of vibrational energy that would be applied to a wafer in the process bath in the position of the test wafer.
    Type: Application
    Filed: July 29, 2004
    Publication date: February 2, 2006
    Inventors: Daniel Kerr, Alan Olds, Bradley Deselms, Dennis Biondi, William Russell