Patents by Inventor Alan Richard Baxendine

Alan Richard Baxendine has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for uniformly heating a substrate
    Patent number: 5859408
    Abstract: Support 7 is uniformly heated from underneath by an annular heater 8 having a vertically adjustable cooling disc 20 in the middle. This arrangement gives a very uniform temperature profile diametrically across the top of the support 7, useful in the production of semiconductor components 10 which are consistently heat treated wherever they are placed on the support 7.Support 7 is rotated and may be subjected to microwave irradiation from an overhead generator 3.
    Type: Grant
    Filed: December 27, 1996
    Date of Patent: January 12, 1999
    Assignee: BTG International Limited
    Inventor: Alan Richard Baxendine