Abstract: An out of tank electrochemical treatment system includes a housing with a treatment fluid supply manifold connected to the one or more treatment fluid reservoirs and including treatment fluid supply channels, a return manifold connected to the one or more treatment fluid reservoirs and including treatment fluid return channels, and an electrode section connected to the treatment fluid supply manifold. A porous pad coupled to the electrode section is configured to contact and wet the substrate with treatment fluid. A frame attached to the housing holds the porous pad and compresses the porous pad reducing the porosity of the porous pad at its periphery to reduce treatment fluid outflow at the periphery of the porous pad. The uniformity of current distribution is increased at the porous pad/substrate interface.

Abstract: An electrochemical treatment system includes a treatment fluid supply manifold, a fluid return manifold, and an electrode section connected to the treatment fluid supply manifold. A plurality of treatment fluid supply ports feed fluid through or across the electrode and a plurality of fluid return ports proximate the treatment fluid supply ports are connected to the fluid return manifold. A porous pad is coupled to the electrode section for contacting a substrate to be treated and receives the treatment fluid via the plurality of treatment fluid supply ports.

Abstract: An electrochemical treatment system includes a treatment fluid supply manifold, a fluid return manifold, and an electrode section connected to the treatment fluid supply manifold. A plurality of treatment fluid supply ports feed fluid through or across the electrode and a plurality of fluid return ports proximate the treatment fluid supply ports are connected to the fluid return manifold. A porous pad is coupled to the electrode section for contacting a substrate to be treated and receives the treatment fluid via the plurality of treatment fluid supply ports. The plurality of fluid return ports remove spent and excess treatment fluid and gases from the substrate, the surrounding air, and the porous pad.

Abstract: Steam production apparatuses are provided. The apparatuses can include at least two compartments that are mechanically engaged. Processes for the production of steam are also provided. The processes can include providing liquid water to a reactive material within a first compartment to generate steam within the first compartment; transferring at least some of the steam to a second compartment that is mechanically engaged with the first compartment; and exposing the steam from the first compartment to material within the second compartment that extends when exposed to the steam, the extending of the material reducing the volume of the first compartment.

Abstract: Steam production apparatuses are provided. The apparatuses can include at least two compartments that are mechanically engaged. Processes for the production of steam are also provided. The processes can include providing liquid water to a reactive material within a first compartment to generate steam within the first compartment; transferring at least some of the steam to a second compartment that is mechanically engaged with the first compartment; and exposing the steam from the first compartment to material within the second compartment that extends when exposed to the steam, the extending of the material reducing the volume of the first compartment.

Abstract: Steam production apparatuses are provided. The apparatuses can include at least two compartments that are mechanically engaged. Processes for the production of steam are also provided. The processes can include providing liquid water to a reactive material within a first compartment to generate steam within the first compartment; transferring at least some of the steam to a second compartment that is mechanically engaged with the first compartment; and exposing the steam from the first compartment to material within the second compartment that extends when exposed to the steam, the extending of the material reducing the volume of the first compartment.

Abstract: An electrochemical treatment system includes a treatment fluid supply manifold, a fluid return manifold, and an electrode section connected to the treatment fluid supply manifold. A plurality of treatment fluid supply ports feed fluid through or across the electrode and a plurality of fluid return ports proximate the treatment fluid supply ports are connected to the fluid return manifold. A porous pad is coupled to the electrode section for contacting a substrate to be treated and receives the treatment fluid via the plurality of treatment fluid supply ports. The plurality of fluid return ports remove spent and excess treatment fluid and gases from the substrate, the surrounding air, and the porous pad.

Abstract: The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.

Abstract: Apparatuses, and related methods, for processing a workpiece that include a particular barrier structure that can overlie and cover a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular movable member that can be positioned over and moved relative to a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular ceiling structure that can overlie a processing chamber. Nozzle devices, and related methods, that include a particular annular body. Nozzle devices, and related methods, that include a particular first, second, and third nozzle structure.

Abstract: Apparatuses, and related methods, for processing a workpiece that include particular baffle members or duct structures having an inlet proximal to an outer periphery of a workpiece and/or workpiece support.

Abstract: The present invention provides a system and method for reducing fraud in a healthcare benefits plan using a predictive model to identify those subscribers having a high probability of maintaining an ineligible dependent under the plan. The predictive model may be developed using subscriber data of the subscriber group being analyzed or using a base case subscriber group having certain similarities to the subscriber group being analyzed. In accordance with the present invention an analysis engine receives subscriber data of subscribers in a subscriber group, which includes data of at least one subscriber reported to have maintained an ineligible dependent under the healthcare benefits plan, and develops a predictive model using the subscriber data. A predictive engine applies the subscriber data to the predictive model.