Patents by Inventor Alan Winn

Alan Winn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition apparatus and method
    Patent number: 5492737
    Abstract: A reactor 10 defines a chamber 11 in which are disposed an upper electrode 12 and a lower workpiece electrode 13. The upper electrode is connected to a R.F. supply whilst the lower electrode is connected to a stress control unit 14. The stress control unit is used to adjust or maintain the effective resistance of the connection between the workpiece electrode 13 and ground.
    Type: Grant
    Filed: August 1, 1994
    Date of Patent: February 20, 1996
    Assignee: Electrotech Equipments Limited
    Inventors: Christopher Dobson, Adrian Kiermasz, Knut Beekmann, Christine Shearer, Edmond Ling, Alan Winn, Rob Wilby