Patents by Inventor Albert C. Bruggeman

Albert C. Bruggeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy
    Patent number: 6054710
    Abstract: A system for determining one or more critical dimension(s) of a semiconductor structure comprising a scanning electron microscope and a parallel distributed process operationally connected to an output of a scanning electron microscope. Said parallel distributed process containing coefficients that provide a multi dimensional mapping space for the output of said scanning electron microscope to map to an output value that provides information on the dimensions of the semiconductor structure.
    Type: Grant
    Filed: December 18, 1997
    Date of Patent: April 25, 2000
    Assignee: Cypress Semiconductor Corp.
    Inventor: Albert C. Bruggeman