Patents by Inventor Albert Jansen

Albert Jansen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stage apparatus, lithographic apparatus and device manufacturing method
    Publication number: 20060279721
    Abstract: A stage apparatus for displacing an object having a substantially flat surface is described. The apparatus includes an object table for supporting the object and a positioning device for displacing the object table in a first direction. The apparatus further includes a clamping device for clamping the object to the object table by a first clamping force, the first clamping force being controlled by an electronic control unit based upon a state of the object.
    Type: Application
    Filed: June 8, 2005
    Publication date: December 14, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Marcel Baggen, Dirk-Jan Bijvoet, Sjoerd Donders, Jan Hoogkamp, Albert Jansen, Jan-Jaap Kuit, Peter Schaap, Joep Janssen, Hubrecht Jasperse, Arjan Van Der Wel