Patents by Inventor Albert P. Cefalo

Albert P. Cefalo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for generating laser light shaped as a line beam
    Patent number: 7471455
    Abstract: Systems and methods are disclosed for shaping a laser beam for interaction with a film in which the laser beam travels along a beam path and defines a short-axis and a long-axis. In one aspect, the system may include a first short-axis element having an edge positioned at a distance, d1, along the beam path from the film and a second short-axis element having an edge positioned at a distance, d2, along the beam path from the film, with d2<d1. An optic may be positioned along the beam path between the second element and the film for focusing the beam in the short-axis for interaction with the film. In another aspect, a system may be provided having a mechanism operative to selectively adjust the curvature of one or both of the edges of the short-axis element.
    Type: Grant
    Filed: October 28, 2005
    Date of Patent: December 30, 2008
    Assignee: Cymer, Inc.
    Inventors: Palash P. Das, Albert P. Cefalo, David S. Knowles, Vitaliy Shklover, Holger Muenz