Patents by Inventor Albert Po Chia Chen

Albert Po Chia Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device manufacturing cleaning process using vaporized solvent
    Patent number: 9536757
    Abstract: A cleaning method using vaporized solvent is provided. A solvent-containing vapor is generated, wherein the solvent-containing vapor comprises a solvent. The solvent-containing vapor is conducted to a substrate having debris or contaminants to clean the substrate, wherein the solvent-containing vapor condenses to form a liquid on a surface of the substrate. The liquid phase of the solvent-containing vapor is changed to a solid phase. The solid phase of the solvent-containing vapor is changed back to a liquid phase. The substrate is spun dried to remove the solvent-containing vapor in liquid phase and any debris or contaminants.
    Type: Grant
    Filed: September 6, 2013
    Date of Patent: January 3, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Albert Po Chia Chen, Kuo-Sheng Chuang, Chi-Ming Yang
  • Device Manufacturing Cleaning Process Using Vaporized Solvent
    Publication number: 20150068559
    Abstract: A cleaning method using vaporized solvent is provided. A solvent-containing vapor is generated, wherein the solvent-containing vapor comprises a solvent. The solvent-containing vapor is conducted to a substrate having debris or contaminants to clean the substrate, wherein the solvent-containing vapor condenses to form a liquid on a surface of the substrate. The liquid phase of the solvent-containing vapor is changed to a solid phase. The solid phase of the solvent-containing vapor is changed back to a liquid phase. The substrate is spun dried to remove the solvent-containing vapor in liquid phase and any debris or contaminants.
    Type: Application
    Filed: September 6, 2013
    Publication date: March 12, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Albert Po Chia Chen, Kuo-Sheng Chuang, Chi-Ming Yang