Patents by Inventor ALBERT S. CHECKANOV

ALBERT S. CHECKANOV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160116361
    Abstract: A system for testing pressure sensors on a device wafer includes a tray for holding the device wafer. The tray includes a base having a surface, a spacer extending from the surface, and a tacky material disposed on the surface. The spacer holds the device wafer spaced apart from the surface of the base to form a chamber between the surface and the device wafer. A wafer chuck retains the tray and the device wafer under vacuum. The system further includes a nozzle and a seal element in fixed engagement with the nozzle. The seal element surrounds the outlet of the nozzle and is adapted for mechanical contact with the device wafer. An actuator is configured to place the nozzle and a diaphragm of one of the pressure sensors in proximity to one another, wherein a pneumatic pressure stimulus is applied to the diaphragm via an outlet of the nozzle.
    Type: Application
    Filed: October 28, 2014
    Publication date: April 28, 2016
    Inventors: BRUNO J. DEBEURRE, ALBERT S. CHECKANOV, JANSEN D. CURRENS, PETER T. JONES, WILLIAM D. MCWHORTER, RAIMONDO P. SESSEGO