Patents by Inventor Albert Schien

Albert Schien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system
    Patent number: 3999097
    Abstract: In an ion implantation apparatus, means for forming multiple, separate parallel ion beams, each having a predetermined spot diameter, and means for focusing each of said ion beams upon a predetermined chip area of a target wafer whereby multiple chip areas upon the wafer can be simultaneously implanted with prescribed ion dosages.
    Type: Grant
    Filed: June 30, 1975
    Date of Patent: December 21, 1976
    Assignee: International Business Machines Corporation
    Inventors: Wen Chuang Ko, Albert Schien, James Robert Winnard