Patents by Inventor Aldrin Bernard Anak Vincent Eddy

Aldrin Bernard Anak Vincent Eddy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gimbal for CMP tool conditioning disk having flexible metal diaphragm
    Patent number: 10814457
    Abstract: A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: October 27, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sunghoon Lee, Sung Pyo Jung, Eric J. Bodensieck, Aldrin Bernard Anak Vincent Eddy, Dinesh R. Koli
  • GIMBAL FOR CMP TOOL CONDITIONING DISK HAVING FLEXIBLE METAL DIAPHRAGM
    Publication number: 20190283215
    Abstract: A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.
    Type: Application
    Filed: March 19, 2018
    Publication date: September 19, 2019
    Inventors: Sunghoon Lee, Sung Pyo Jung, Eric J. Bodensieck, Aldrin Bernard Anak Vincent Eddy, Dinesh R. Koli