Patents by Inventor Aleksander Zelenski

Aleksander Zelenski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7125313
    Abstract: An apparatus for abrading a workpiece comprises a first plate assembly having a first surface for supporting a workpiece and a second plate assembly having a second surface for engaging the workpiece to abrade a portion thereof. A displacement shaft is mounted for movement with respect to the upper and lower plate assemblies and has a first end configured to engage the upper plate assembly. A feedback assembly is coupled to the displacement shaft for moving the displacement shaft to substantially maintain a predetermined load exerted on the displacement shaft by the upper plate assembly.
    Type: Grant
    Filed: February 25, 2004
    Date of Patent: October 24, 2006
    Assignee: Novellus Systems, Inc.
    Inventors: Aleksander Zelenski, Sergey Cheprasov
  • Publication number: 20040176017
    Abstract: Methods and apparatus are provided for abrading a work piece. The apparatus has two support members to which a carriage member is slidably mounted. A vertical drive mechanism moves the carriage member in a vertical direction. A spindle is supported by the carriage member, has a longitudinal channel, and is configured to rotate about a central axis. The apparatus also has an upper abrading wheel having a first working surface and a lower abrading wheel having a second working surface. The second working surface is parallel to and in vertical opposition to the first working surface. The upper abrading wheel comprises a plurality of conduits, each having a first orifice and a second orifice. The first orifices of the conduits are disposed at the first working surface and the second orifices are in fluid communication with the longitudinal channel of the spindle.
    Type: Application
    Filed: February 24, 2004
    Publication date: September 9, 2004
    Inventors: Aleksander Zelenski, Sergey Cheprasov
  • Publication number: 20040166769
    Abstract: An apparatus for abrading a workpiece comprises a first plate assembly having a first surface for supporting a workpiece and a second plate assembly having a second surface for engaging the workpiece to abrade a portion thereof. A displacement shaft is mounted for movement with respect to the upper and lower plate assemblies and has a first end configured to engage the upper plate assembly. A feedback assembly is coupled to the displacement shaft for moving the displacement shaft to substantially maintain a predetermined load exerted on the displacement shaft by the upper plate assembly.
    Type: Application
    Filed: February 25, 2004
    Publication date: August 26, 2004
    Inventors: Aleksander Zelenski, Sergey Cheprasov