Patents by Inventor Aleksandra SZKUDLAREK

Aleksandra SZKUDLAREK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VACUUM SYSTEM CLUSTER TOOL
    Publication number: 20240026534
    Abstract: The disclosed invention comprises a vacuum system cluster tool (0), comprising a dual chamber setup with at least one chemical vapour deposition chamber (1) and at least one physical vapour deposition chamber (3), with corresponding chemical vapour deposition means (10, 11, 12, 13) and corresponding physical vapour deposition means (30, 31, 32, 33) attached, as compact inexpensive, simply constructed vacuum system cluster tool (1) without mechanical sample transfer is created.
    Type: Application
    Filed: July 25, 2022
    Publication date: January 25, 2024
    Applicant: EMPA Eidgenössische Materialprüfungs- und Forschungsanstalt
    Inventors: Carlos GUERRA, Laszlo PETHO, Johann MICHLER, Aleksandra SZKUDLAREK