Abstract: A method for fabricating a multi-cell electroacoustic transducer comprises placing a rail layer onto a base, the rail layer comprising a plurality of apertures arranged in an array, filling cavities in the rail layer with a polymer, and applying a flexural plate to the rail layer. The transducer achieves high transmission sensitivity across a broad bandwidth. The transducer may be designed to have a broad or a focused directivity pattern, or may be multi-frequency, depending on the particular application and has a range of applications.

Abstract: A method of forming a capacitive micromachined ultrasonic transducer (CMUT) device includes bonding a CMUT substrate to a silicon on insulator (SOI) substrate. The CMUT substrate has a first thickness and the SOI substrate includes a handle, a buried oxide layer, and a device layer. At least one of the CMUT substrate or the SOI substrate includes a patterned dielectric layer. The device layer is bonded to the patterned dielectric layer to form a plurality of sealed cavities and the device layer forms a diaphragm of the plurality of cavities. The method further includes reducing the first thickness of the CMUT substrate to a second thickness and forming a plurality of through-silicon vias from a second surface of the CMUT substrate opposite the first surface.

Abstract: A micromechanical device for transducing acoustic waves in a propagation medium, comprising: a body; a first electrode structure superimposed to the body and electrically insulated from the body, the first electrode structure and the body defining between them a first buried cavity; and a first piezoelectric element superimposed to the first electrode structure, wherein the body, the first electrode structure, and the buried cavity form a first capacitive ultrasonic transducer, and the first electrode structure and the first piezoelectric element form a first piezoelectric ultrasonic transducer.

Abstract: A method of forming a capacitive micromachined ultrasonic transducer (CMUT) device includes bonding a CMUT substrate to a silicon on insulator (SOI) substrate. The CMUT substrate has a first thickness and the SOI substrate includes a handle, a buried oxide layer, and a device layer. At least one of the CMUT substrate or the SOI substrate includes a patterned dielectric layer. The device layer is bonded to the patterned dielectric layer to form a plurality of sealed cavities and the device layer forms a diaphragm of the plurality of cavities. The method further includes reducing the first thickness of the CMUT substrate to a second thickness and forming a plurality of through-silicon vias from a second surface of the CMUT substrate opposite the first surface.

Abstract: The present invention relates to a transducer device having a planar array of electroacoustic cells, each including a piezoelectric bilayer unit. The transducer device achieves high transmission sensitivity across a broad bandwidth. The transducer device may be designed to have a broad or a focused directivity pattern, or may be multi-frequency, depending on the particular application and has a range of applications. For example, the transducer device may be used with an implanted passive ultrasonically excitable resonating sensor, to excite the sensor and/or to interrogate the sensor, for example in conjunction with Doppler-based analysis of the resonance frequency of the sensor, and/or to locate an implanted sensor. The invention also relates to a method of manufacturing the device.

Abstract: The present invention relates to a transducer device having a planar array of electroacoustic cells, each including a piezoelectric bilayer unit. The transducer device achieves high transmission sensitivity across a broad bandwidth. The transducer device may be designed to have a broad or a focused directivity pattern, or may be multi-frequency, depending on the particular application and has a range of applications. For example, the transducer device may be used with an implanted passive ultrasonically excitable resonating sensor, to excite the sensor and/or to interrogate the sensor, for example in conjunction with Doppler-based analysis of the resonance frequency of the sensor, and/or to locate an implanted sensor. The invention also relates to a method of manufacturing the device.

Abstract: The present invention relates to a transducer device having a planar array of electroacoustic cells, each including a piezoelectric bilayer unit. The transducer device achieves high transmission sensitivity across a broad bandwidth. The transducer device may be designed to have a broad or a focused directivity pattern, or may be multi-frequency, depending on the particular application and has a range of applications. For example, the transducer device may be used with an implanted passive ultrasonically excitable resonating sensor, to excite the sensor and/or to interrogate the sensor, for example in conjunction with Doppler-based analysis of the resonance frequency of the sensor, and/or to locate an implanted sensor. The invention also relates to a method of manufacturing the device.

Abstract: Ultrasound transducer comprising an array of electro-acoustic micro-cells, a first and a second group of transducer elements arranged substantially along two directions (x, y), each element being defined by a group of micro-cells of the array, at least part of the micro-cells of each group being electrically interconnected by a first connection pattern having shape with main orientation along one of the two directions (x, y), characterized in that each group of micro-cells defining each element comprises micro-cells interconnected by further connection pattern or patterns having shape with main orientation along the other of the two directions (y, x).

Abstract: The invention relates to an electro-acoustic transducer, particularly an ultrasonic transducer, comprising a plurality of electrostatic micro-cells of the cMUT type. The electrostatic micro-cells are arranged in homogeneous groups of micro-cells having the same geometrical characteristics. The micro-cells of each group have geometries different from the geometry of the micro-cells of the other group or groups.

Abstract: The invention concerns a capacitive ultrasonic transducer, comprising an external layer operating as an external plate, provided with electrode means, capable to vibrate, and a stiff substrate, in turn provided with electrode means, wherein it further comprises n levels, with n?2, interposed between the plate and the substrate, each level including a plurality of cavities, and m interface intermediate layers, capable to vibrate, among said n levels, with m=(n?1), the cavities of each one of said n levels being further defined by support means connected between faced surfaces of layers adjacent to said cavities, each one of said m intermediate layers being provided with electrode means, whereby the cavities of each level are interposed between a pair of electrode means belonging to either two adjacent intermediate layers or to an intermediate layer and to one out of the substrate and the plate.

Abstract: The invention concerns a capacitive ultrasonic transducer, comprising an external layer operating as an external plate, provided with electrode means, capable to vibrate, and a stiff substrate, in turn provided with electrode means, wherein it further comprises n levels, with n?2, interposed between the plate and the substrate, each level including a plurality of cavities, and m interface intermediate layers, capable to vibrate, among said n levels, with m=(n?1), the cavities of each one of said n levels being further defined by support means connected between faced surfaces of layers adjacent to said cavities, each one of said m intermediate layers being provided with electrode means, whereby the cavities of each level are interposed between a pair of electrode means belonging to either two adjacent intermediate layers or to an intermediate layer and to one out of the substrate and the plate.