Patents by Inventor Alex GERRARD

Alex GERRARD has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coolant and a method to control the pH and resistivity of coolant used in a heat exchanger
    Patent number: 11125512
    Abstract: Implementations described herein generally relate to substrate processing equipment and more particularly to methods and compositions for temperature control of substrate processing equipment. In one implementation, a method of cooling a processing chamber component is provided. The method comprises introducing an inert purge gas into a supply reservoir containing a coolant and flowing the treated coolant to a processing chamber component to cool the processing chamber component. The coolant initially comprises deionized water and a water-soluble base.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: September 21, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Jianqi Wang, Joung Woo Lee, Gia Pham, Alex Gerrard, Robert C. McIntosh
  • COOLANT AND A METHOD TO CONTROL THE PH AND RESISTIVITY OF COOLANT USED IN A HEAT EXCHANGER
    Publication number: 20170307310
    Abstract: Implementations described herein generally relate to substrate processing equipment and more particularly to methods and compositions for temperature control of substrate processing equipment. In one implementation, a method of cooling a processing chamber component is provided. The method comprises introducing an inert purge gas into a supply reservoir containing a coolant and flowing the treated coolant to a processing chamber component to cool the processing chamber component. The coolant initially comprises deionized water and a water-soluble base.
    Type: Application
    Filed: March 29, 2017
    Publication date: October 26, 2017
    Inventors: Jianqi WANG, Joung Woo LEE, Gia PHAM, Alex GERRARD, Robert C. MCINTOSH