Abstract: A MEMS chip having at least two chip components bonded together by means of an adhesive layer that is applied to at least one of two mating bonding surfaces of the two components, wherein a pattern of finely distributed micro-cavities is formed in at least one of the two mating bonding surfaces, said micro-cavities being arranged to accommodate a major part of the adhesive.

Abstract: A substrate plate is provided for at least one MEMS device to be mounted thereon. The MEMS device has a certain footprint on the substrate plate, and the substrate plate has a pattern of electrically conductive leads to be connected to electric components of the MEMS device. The pattern forms contact pads within the footprint of the MEMS device and includes at least one lead structure that extends on the substrate plate outside of the footprint of the MEMS device and connects a number of the contact pads to an extra contact pad. The lead structure is a shunt bar that interconnects a plurality of contact pads of the MEMS device and is arranged to be removed by means of a dicing cut separating the substrate plate into a plurality of chip-sized units. At least a major part of the extra contact pad is formed within the footprint of one of the MEMS devices.

Abstract: A MEMS chip having at least two chip components bonded together by means of an adhesive layer that is applied to at least one of two mating bonding surfaces of the two components, wherein a pattern of finely distributed micro-cavities is formed in at least one of the two mating bonding surfaces, said micro-cavities being arranged to accommodate a major part of the adhesive.

Abstract: A droplet ejection device includes a pressure chamber; a nozzle orifice arranged in fluid connection with the pressure chamber; an actuator system for generating a pressure wave in a liquid present in the pressure chamber; and an obstruction member arranged in the pressure chamber in a position opposite to the nozzle orifice. The obstruction member comprises a first surface facing the nozzle orifice and rigidly coupled to a wall of the pressure chamber via a support. The support is arranged near the first surface of the obstruction member. The droplet ejection device according to the present invention may further comprise a structured nozzle inflow means which provides a gradual transition from the hollow shaped liquid passage to the nozzle orifice. The droplet ejection device prevents or at least mitigates air entrapment in dead volumes present in the interior of the droplet ejection device.

Abstract: A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.

Abstract: A substrate plate is provided for at least one MEMS device to be mounted thereon. The MEMS device has a certain footprint on the substrate plate, and the substrate plate has a pattern of electrically conductive leads to be connected to electric components of the MEMS device. The pattern forms contact pads within the footprint of the MEMS device and includes at least one lead structure that extends on the substrate plate outside of the footprint of the MEMS device and connects a number of the contact pads to an extra contact pad. The lead structure is a shunt bar that interconnects a plurality of contact pads of the MEMS device and is arranged to be removed by means of a dicing cut separating the substrate plate into a plurality of chip-sized units. At least a major part of the extra contact pad is formed within the footprint of one of the MEMS devices.

Abstract: A droplet ejection device includes a pressure chamber; a nozzle orifice arranged in fluid connection with the pressure chamber; an actuator system for generating a pressure wave in a liquid present in the pressure chamber; and an obstruction member arranged in the pressure chamber in a position opposite to the nozzle orifice. The obstruction member comprises a first surface facing the nozzle orifice and rigidly coupled to a wall of the pressure chamber via a support. The support is arranged near the first surface of the obstruction member. The droplet ejection device according to the present invention may further comprise a structured nozzle inflow means which provides a gradual transition from the hollow shaped liquid passage to the nozzle orifice. The droplet ejection device prevents or at least mitigates air entrapment in dead volumes present in the interior of the droplet ejection device.

Abstract: A print head comprises a pressure chamber in fluid communication with a nozzle and an actuator structure in operative communication with the pressure chamber for generating a pressure wave in the pressure chamber. The actuator structure comprises a membrane, wherein a first surface of the membrane forms a flexible wall of the pressure chamber and a piezo actuator, wherein the piezo actuator is arranged on a second surface of the membrane, the second surface being opposite of the first surface, such that the membrane is deformed at the position of the piezo actuator upon actuation of the piezo actuator. In the print head, the membrane is pivotably clamped between a first structure layer and a second structure layer such that the membrane pivots at the location of clamping upon deformation of the membrane due to actuation of the piezo actuator.

Abstract: A method of forming an array of piezoelectric actuators on a membrane (18) which includes the steps of preparing a piezoelectric comb-like structure having an array of islands that are integrally connected by a continuous top portion and that form piezoelectric layers of the actuators, the islands having an electrode at a bottom side, attaching the comb-like structure with its bottom electrode to a surface of the membrane, removing the continuous top portion of the comb-like structure to thereby separate the actuators from one another, and forming top electrodes on the top surfaces of the piezoelectric layers of the actuators.

Abstract: A print head comprises a pressure chamber in fluid communication with a nozzle and an actuator structure in operative communication with the pressure chamber for generating a pressure wave in the pressure chamber. The actuator structure comprises a membrane, wherein a first surface of the membrane forms a flexible wall of the pressure chamber and a piezo actuator, wherein the piezo actuator is arranged on a second surface of the membrane, the second surface being opposite of the first surface, such that the membrane is deformed at the position of the piezo actuator upon actuation of the piezo actuator. In the print head, the membrane is pivotably clamped between a first structure layer and a second structure layer such that the membrane pivots at the location of clamping upon deformation of the membrane due to actuation of the piezo actuator.

Abstract: An ink jet print head, having a pressure generation chamber arranged for being in communication with a print head nozzle and an actuator membrane for delimiting the pressure generation chamber. The actuator membrane has a substrate and a piezoelectric actuator provided on the substrate, said piezoelectric actuator having a lower electrode, an upper electrode and at least one piezoelectric layer arranged between the lower electrode and the upper electrode; the substrate and the upper electrode are arranged on opposite sides of the piezoelectric layer, and the upper electrode has a Titanium-Tungsten film.

Abstract: A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.

Abstract: A method of manufacturing a piezoelectric ink jet device having a pressure chamber, a flexible membrane delimiting the pressure chamber, a piezoelectric actuator mounted on the membrane, and a rigid substrate attached to the side of the membrane carrying the actuator, which includes the steps of providing the piezoelectric actuator with an electrode on at least one side, attaching the actuator with its electrode side to a carrier plate, bonding the rigid substrate to the side of the carrier plate carrying the actuator, and removing material from the carrier plate on the side opposite to the actuator and leaving only a thin layer of the carrier plate which then forms the membrane.

Abstract: In a method of manufacturing an ink jet print head that includes a number of aligned modules, an alignment mark is foamed on a first and a second adjacent module, wherein the alignment mark is positioned on a boundary between the first and the second adjacent module along which the wafer is to be separated. In a separating step the wafer is separated into separate modules such that the alignment mark is divided over said first and second adjacent module. At least one of said first and second module is aligned by reference to the divided alignment mark The method improves the accuracy, with which the modules can be aligned.

Abstract: In a printer, an inkjet print head is equipped with a wiper for partially wetting and non-wetting nozzle faces, for wiping excess ink off a nozzle face, wherein the wiping surface is shaped such that the wiping surface in operation contacts the wetting area and such that the wiping surface in operation is arranged at a predetermined distance from the non-wetting area. A printer including the wiper is also provided.

Abstract: In a method of manufacturing an ink jet print head that includes a number of aligned modules, an alignment mark is foamed on a first and a second adjacent module, wherein the alignment mark is positioned on a boundary between the first and the second adjacent module along which the wafer is to be separated. In a separating step the wafer is separated into separate modules such that the alignment mark is divided over said first and second adjacent module. At least one of said first and second module is aligned by reference to the divided alignment mark. The method improves the accuracy, with which the modules can be aligned.

Abstract: A piezoelectric actuator having a bottom electrode attached to a membrane, a piezoelectric layer on the bottom electrode, and a top electrode formed on the piezoelectric layer, wherein the bottom electrode extends substantially over the entire bottom surface of the piezoelectric layer, and at least a peripheral portion of a top surface of the piezoelectric layer and side faces of that layer are covered with an insulating layer, and wherein in the peripheral portion of the top surface of the piezoelectric layer the top electrode is superposed on the insulating layer.

Abstract: A method of forming an array of piezoelectric actuators on a membrane (18) which includes the steps of preparing a piezoelectric comb-like structure having an array of islands that are integrally connected by a continuous top portion and that form piezoelectric layers of the actuators, the islands having an electrode at a bottom side, attaching the comb-like structure with its bottom electrode to a surface of the membrane, removing the continuous top portion of the comb-like structure to thereby separate the actuators from one another, and forming top electrodes on the top surfaces of the piezoelectric layers of the actuators.

Abstract: A method of manufacturing a piezoelectric ink jet device having a pressure chamber, a flexible membrane delimiting the pressure chamber, a piezoelectric actuator mounted on the membrane, and a rigid substrate attached to the side of the membrane carrying the actuator, which includes the steps of providing the piezoelectric actuator with an electrode on at least one side, attaching the actuator with its electrode side to a carrier plate, bonding the rigid substrate to the side of the carrier plate carrying the actuator, and removing material from the carrier plate on the side opposite to the actuator and leaving only a thin layer of the carrier plate which then forms the membrane.

Abstract: A piezoelectric actuator having a bottom electrode attached to a membrane, a piezoelectric layer on the bottom electrode, and a top electrode formed on the piezoelectric layer, wherein the bottom electrode extends substantially over the entire bottom surface of the piezoelectric layer, and at least a peripheral portion of a top surface of the piezoelectric layer and side faces of that layer are covered with an insulating layer, and wherein in the peripheral portion of the top surface of the piezoelectric layer the top electrode is superposed on the insulating layer.