Abstract: Methods and apparatus for enabling a fine stage to be moved using pneumatics such that disturbances associated with a pneumatic transfer system are not transmitted to the fine stage are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage, a second stage, and a pneumatic transfer system. The pneumatic transfer system includes at least one transfer mechanism and a transfer block. The transfer mechanism is substantially directly coupled be coupled between the first stage and the transfer block, and the first stage provides a flow through the transfer mechanism to the transfer block. The transfer block is arranged to be positioned over a surface of the second stage to provide the flow to the second stage substantially without contacting the second stage.

Abstract: A force provider (232A) for a stage assembly (220A) includes a provider housing (238A) and a piston assembly (240A). The provider housing (238A) defines a piston chamber (344), and includes a first beam aperture (352F), a first cylinder aperture (350F) that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture (350S) that is in fluid communication with a fluid at the first pressure. The piston assembly (340) includes a piston (356) positioned in the piston chamber (344), and a first beam (358F) extending through the first beam aperture (352F). The first beam (358F) is secured to the piston (356). The piston (356) moves along a piston path (462). At a second piston region (462S) of the piston path (462) the piston (356) is positioned between the cylinder apertures (350F)(350S).

Abstract: Methods and apparatus for enabling a stage apparatus to scan an object within a vacuum environment while isolating actuators, cables, and hoses from the vacuum environment are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage and a first actuator. The first stage is effectively configured such that an interior space is defined substantially within the first stage. The first actuator is positioned within the interior space, and drives the first stage in a first direction.

Abstract: A measurement system (222) for measuring the position of a stage (248) along a first axis includes a first system (260) having a first beam source (260A) that directs a first beam (260H) on a first path that is parallel with a second axis and a first redirector (260D) that redirects the first beam so that the redirected first beam (260H) is on a first redirected path that is parallel with the first axis irrespective to the orientation of the first redirector (260D) about a third axis. The measurement system (222) can include a shield (380) that protects the first beam (260H) from environmental conditions.