Abstract: Various embodiments may provide a method of fabricating a meta-lens structure. The method may include forming a first dielectric layer in contact with a silicon wafer. The method may also include forming a second dielectric layer in contact with the first dielectric layer. A refractive index of the second dielectric layer may be different from a refractive index of the first dielectric layer. The method may further include, in patterning the second dielectric layer. The method may additionally include removing at least a portion of the silicon wafer to expose the first dielectric layer.

Abstract: Various embodiments may relate a chemical sensor. The chemical sensor may include a substrate including a first sealed (or isolated) cavity and a second sealed (or isolated) cavity separate from the first sealed (or isolated) cavity. The chemical sensor may also include an emitter in the first sealed (or isolated) cavity, the emitter configured to emit infrared light. The chemical sensor may further include a detector in the second sealed (or isolated) cavity. The chemical sensor may also include a waveguide configured to carry the infrared light from the emitter to the detector. The waveguide may include a sensing portion configured such that a property of the infrared light carried through the sensing portion changes in response to a chemical entity in contact with the sensing portion. The detector may be configured to detect the change in the property (of the infrared light).

Abstract: Various embodiments may relate to an optical device. The device may include an elongate substrate, an emitter portion at a distal end portion of the elongate substrate, the emitter portion configured to emit light, and an actuator portion at a proximal end portion of the elongate substrate opposite the distal end portion of the elongate substrate. The emitter portion may include a first electrode, a second electrode, and an active layer between the first electrode and the second electrode so that the light is emitted due to an increase in a temperature of the active layer upon application of a first potential difference between the first electrode and the second electrode. The active layer may be patterned to form a photonic crystal layer for enhancing directionality of the emitted light.

Abstract: A device for vascular denervation comprising a catheter for insertion into a vessel, at least one elongated catheter arm having alternating regions of flexible joints and rigid blocks along the at least one catheter arm, wherein each of the at least one catheter arm comprises at least one tactile sensor and at least one temperature sensor; at least one electrode and electrical circuitry disposed on each of the at least one catheter arm and at least one linkage connected to all of the elongated catheter arms. A method for batch fabricating a plurality of catheter arms for the vascular denervation device is also provided and comprises the steps of depositing a first polymer coating on a semiconductor substrate, forming metal traces on the first polymer coating, patterning and etching the substrate to the first polymer coating to create flexible joint regions.

Abstract: Various embodiments may provide a method of fabricating a meta-lens structure. The method may include forming a first dielectric layer in contact with a silicon wafer. The method may also include forming a second dielectric layer in contact with the first dielectric layer. A refractive index of the second dielectric layer may be different from a refractive index of the first dielectric layer. The method may further include, in patterning the second dielectric layer. The method may additionally include removing at least a portion of the silicon wafer to expose the first dielectric layer.

Abstract: A sensor module for detecting particulate matter of an aerosol, which may include a source of electromagnetic radiation and a collector for electromagnetic radiation. The collector may include a cavity and a first opening for the aerosol. The cavity may be reflective for the electromagnetic radiation. The first opening may allow exchange of the aerosol in and out of the cavity. The source of electromagnetic radiation may be arranged to project the electromagnetic radiation onto the aerosol which may be scattered as scattered electromagnetic radiation. The sensor module may include a detector of electromagnetic radiation arranged to detect the scattered electromagnetic radiation that is reflected by the collector. The source and the detector may be arranged on a same side of the collector. The source and the detector may be arranged at a same aperture of the collector.

Abstract: Various embodiments may relate to an optical device. The device may include an elongate substrate, an emitter portion at a distal end portion of the elongate substrate, the emitter portion configured to emit light, and an actuator portion at a proximal end portion of the elongate substrate opposite the distal end portion of the elongate substrate. The emitter portion may include a first electrode, a second electrode, and an active layer between the first electrode and the second electrode so that the light is emitted due to an increase in a temperature of the active layer upon application of a first potential difference between the first electrode and the second electrode. The active layer may be patterned to form a photonic crystal layer for enhancing directionality of the emitted light.

Abstract: Various embodiments may relate a chemical sensor. The chemical sensor may include a substrate including a first sealed (or isolated) cavity and a second sealed (or isolated) cavity separate from the first sealed (or isolated) cavity. The chemical sensor may also include an emitter in the first sealed (or isolated) cavity, the emitter configured to emit infrared light. The chemical sensor may further include a detector in the second sealed (or isolated) cavity. The chemical sensor may also include a waveguide configured to carry the infrared light from the emitter to the detector. The waveguide may include a sensing portion configured such that a property of the infrared light carried through the sensing portion changes in response to a chemical entity in contact with the sensing portion. The detector may be configured to detect the change in the property (of the infrared light).

Abstract: Various embodiments may provide a gyroscope. The gyroscope may include a piezoelectric substrate, an excitation transducer configured to generate a surface acoustic wave, and a sensing transducer configured to receive the surface acoustic wave generated by the excitation transducer. The gyroscope may additionally include a mass dot array between the excitation transducer and the sensing transducer, the mass dot array configured to generate a stress on the piezoelectric substrate based on a rotation of said gyroscope upon the surface acoustic wave passing through the mass dot array. The gyroscope may also include a light source, and an optical detector configured to receive one or more light beams generated by the light source to determine the rotation of the gyroscope based on a property of the one or more light beams. The property of the one or more light beams may be variable based on the stress on the piezoelectric substrate.

Abstract: Various embodiments may provide an optical gyroscope. The optical gyroscope may include a ring resonator, an input source configured to generate or provide a first light beam and a second light beam to the ring resonator, and a switching pathway having an input end and an output end coupled to the ring resonator, and may include a plurality of switches. The optical gyroscope may include a control circuit configured to control the plurality of switches to allow the first light beam to propagate from the input end to the output end along the switching pathway during a first time interval, and allow the second light beam to propagate from the input end to the output end along the switching pathway during a second time interval. The optical gyroscope may additionally include a detector loop configured to receive the first light beam and the second light beam from the ring resonator.

Abstract: There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.

Abstract: Various embodiments may provide an optical gyroscope. The optical gyroscope may include a ring resonator, an input source configured to generate or provide a first light beam and a second light beam to the ring resonator, and a switching pathway having an input end and an output end coupled to the ring resonator, and may include a plurality of switches. The optical gyroscope may include a control circuit configured to control the plurality of switches to allow the first light beam to propagate from the input end to the output end along the switching pathway during a first time interval, and allow the second light beam to propagate from the input end to the output end along the switching pathway during a second time interval. The optical gyroscope may additionally include a detector loop configured to receive the first light beam and the second light beam from the ring resonator.

Abstract: According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substantially in a centre region of the cell; and four electrode frames, each electrode frame of the four electrode frames arranged at a corner region of the cell and coupled to a respective side of the proof mass.

Abstract: A device for vascular denervation comprising a catheter for insertion into a vessel, at least one elongated catheter arm having alternating regions of flexible joints and rigid blocks along the at least one catheter arm, wherein each of the at least one catheter arm comprises at least one tactile sensor and at least one temperature sensor; at least one electrode and electrical circuitry disposed on each of the at least one catheter arm and at least one linkage connected to all of the elongated catheter arms. A method for batch fabricating a plurality of catheter arms for the vascular denervation device is also provided and comprises the steps of depositing a first polymer coating on a semiconductor substrate, forming metal traces on the first polymer coating, patterning and etching the substrate to the first polymer coating to create flexible joint regions.

Abstract: A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.

Abstract: According to embodiments of the present invention, an energy harvesting device is provided. The energy harvesting device includes a plurality of energy harvesting elements, each energy harvesting element including a transducer, and at least one spring arranged in between at least two energy harvesting elements of the plurality of energy harvesting elements to mechanically couple the at least two energy harvesting elements to each other. According to further embodiments of the present invention, a method for forming an energy harvesting device is also provided.

Abstract: In various embodiments, a device for determining a property of a fluid may be provided. The device may include a fluid receiving structure configured to receive the fluid having a first condition. The device may further include a flow control structure coupled to the fluid receiving structure. The flow control structure may be configured to change the first condition of the fluid to a second condition. The device may further include a determination mechanism configured to determine the property of the fluid based on the second condition. The device may also include a voltage generation mechanism a voltage generation mechanism configured to generate a voltage based on the second condition.

Abstract: A sensing device comprising a first array of electrodes encapsulated in a first elastomeric layer; a second array of electrodes encapsulated in a second elastomeric layer; a third elastomeric layer intermediate the first and second elastomeric layer and comprising an array of micro-structures, wherein said electrodes and elastomeric layers are configured such that a displacement of said micro-structures, in response to one or more forces and/or pressures applied to said device, causes a capacitance of said device to vary as a function of said forces and/or pressure applied.

Abstract: There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.

Abstract: In various embodiments, a device for determining a property of a fluid may be provided. The device may include a fluid receiving structure configured to receive the fluid having a first condition. The device may further include a flow control structure coupled to the fluid receiving structure. The flow control structure may be configured to change the first condition of the fluid to a second condition. The device may further include a determination mechanism configured to determine the property of the fluid based on the second condition. The device may also include a voltage generation mechanism a voltage generation mechanism configured to generate a voltage based on the second condition.