Patents by Inventor Alexandar Nikolov ZDRAVKOV

Alexandar Nikolov ZDRAVKOV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
    Publication number: 20180373170
    Abstract: Methods of manufacturing a membrane assembly where, in one arrangement, a stack includes a planar substrate and at least one membrane layer. The planar substrate includes an inner region, a border region around the inner region, a bridge region around the border region and an edge region around the bridge region. The inner region and a first portion of the bridge region are removed. The membrane assembly after removal has: a membrane formed from the at least one membrane layer, a border holding the membrane, the border formed from the border region, an edge section around the border, the edge section formed from the edge region, a bridge between the border and the edge section, the bridge formed from the at least one membrane layer and a second portion of the bridge region. The method further involves separating the edge section from the border by cutting or breaking the bridge.
    Type: Application
    Filed: December 2, 2016
    Publication date: December 27, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Paul JANSSEN, Johan Hendrik KLOOTWIJK, Wilhelmus Theodorus Anthonius Johannes VAN DEN EINDEN, Alexandar Nikolov ZDRAVKOV