Patents by Inventor Alexander A. Balmashnov

Alexander A. Balmashnov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the production of a dissociated atomic particle flow
    Patent number: 5336533
    Abstract: Apparatus and methods for forming a source of dissociated and excited molecules from a working gas-plasma interaction for use in treating substrates such as hydrogen passivation of semiconductors. A plasma is generated under resonant conditions and confined in a reaction chamber by a magnetic mirror trap. The working gas is injected into the reaction chamber to intersect the confined plasma. The interaction forms a neutral species of dissociated and excited molecules and a charged species of ions and electrons. A multipole magnetic field is used to stabilize the plasma and maintain the charged particles of the plasma and the charged species away from the reaction chamber. The charged species is confined to the plasma by the net magnetic field so that the neutral species flows out of the reaction chamber for processing of substrates, e.g., hydrogenation of semiconductor materials.
    Type: Grant
    Filed: October 22, 1993
    Date of Patent: August 9, 1994
    Assignee: Ruxam, Inc.
    Inventors: Alexander A. Balmashnov, Konstantin S. Golovanivsky, Erzam M. Omeljanovsky, Andrew V. Pakhomov, Alexander Y. Polyakov
  • Apparatus for the production of a dissociated atomic particle flow
    Patent number: 5282899
    Abstract: Apparatus for forming a source of dissociated and excited molecules from a working gas-plasma interaction for use in treating substrates such as hydrogen passivation of semiconductors. A plasma is generated under resonant conditions and confined in a reaction chamber by a magnetic mirror trap. The working gas is injected into the reaction chamber to intersect the confined plasma. The interaction forms a neutral species of dissociated and excited molecules and a charged species of ions and electrons. A multipole magnetic field is used to stabilize the plasma and maintain the charged particles of the plasma and the charged species away from the reaction chamber. The charged species is confined to the plasma by the net magnetic field so that the neutral species flows out of the reaction chamber for processing of substrates, e.g., hydrogenation of semiconductor materials.
    Type: Grant
    Filed: June 10, 1992
    Date of Patent: February 1, 1994
    Assignee: Ruxam, Inc.
    Inventors: Alexander A. Balmashnov, Konstantin S. Golovanivsky, Erzam M. Omeljanovsky, Andrew V. Pakhomov, Alexander Y. Polyakov