Patents by Inventor Alexander D. Wesley

Alexander D. Wesley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9115975
    Abstract: An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.
    Type: Grant
    Filed: October 3, 2013
    Date of Patent: August 25, 2015
    Assignee: Zygo Corporation
    Inventors: Jan Liesener, Robert M. Carangelo, Leslie L. Deck, Michael Lowell Holmes, Alexander D. Wesley
  • Publication number: 20140098375
    Abstract: An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.
    Type: Application
    Filed: October 3, 2013
    Publication date: April 10, 2014
    Inventors: Jan Liesener, Robert M. Carangelo, Leslie L. Deck, Michael Lowell Holmes, Alexander D. Wesley