Patents by Inventor Alexander Groholskiy

Alexander Groholskiy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR TILTING A BEAM SYSTEM
    Publication number: 20030222221
    Abstract: The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.
    Type: Application
    Filed: May 31, 2002
    Publication date: December 4, 2003
    Inventors: Alexander Groholskiy, Riccardo Drainoni, Michael Tanguay