Patents by Inventor Alexander HULSKER

Alexander HULSKER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring of MEMS mirror properties
    Patent number: 11442265
    Abstract: A method of monitoring a microelectromechanical systems (MEMS) oscillating structure includes: driving the MEMS oscillating structure configured to oscillate about a rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, wherein the MEMS oscillating structure is a non-linear resonator; inducing an oscillation decay of the MEMS oscillating structure at predefined tilt angle such that an oscillation of the MEMS oscillating structure decays from the predefined tilt angle over a decay period; measuring at least one characteristic of the oscillation decay; and determining a mechanical health of the MEMS oscillating structure based on the at least one characteristic of the oscillation decay.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: September 13, 2022
    Inventors: Hendrikus Van Lierop, Alexander Hulsker, Jaap Verheggen
  • MONITORING OF MEMS MIRROR PROPERTIES
    Publication number: 20210311300
    Abstract: A method of monitoring a microelectromechanical systems (MEMS) oscillating structure includes: driving the MEMS oscillating structure configured to oscillate about a rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, wherein the MEMS oscillating structure is a non-linear resonator; inducing an oscillation decay of the MEMS oscillating structure at predefined tilt angle such that an oscillation of the MEMS oscillating structure decays from the predefined tilt angle over a decay period; measuring at least one characteristic of the oscillation decay; and determining a mechanical health of the MEMS oscillating structure based on the at least one characteristic of the oscillation decay.
    Type: Application
    Filed: June 17, 2021
    Publication date: October 7, 2021
    Applicant: Infineon Technologies AG
    Inventors: Hendrikus VAN LIEROP, Alexander HULSKER, Jaap VERHEGGEN
  • Monitoring of MEMS mirror properties
    Patent number: 11073686
    Abstract: Systems and methods are provided for monitoring properties of a microelectromechanical systems (MEMS) oscillating structure. A system includes a MEMS oscillating structure configured as a non-linear resonator to oscillate about a rotation axis; a driver configured to generate a driving force for driving the MEMS oscillating structure about the rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, the driver further configured to decrease the driving force when the MEMS oscillating structure is at a predefined tilt angle to induce an oscillation decay of the MEMS oscillating structure; a measurement circuit configured to measure an oscillation frequency and a tilt angle amplitude of the MEMS oscillating structure during a decay period; and processing circuitry configured to determine at least one characteristic of the MEMS oscillating structure based on at least one of the measured oscillation frequency and the measured tilt angle amplitude.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: July 27, 2021
    Inventors: Hendrikus Van Lierop, Alexander Hulsker, Jaap Verheggen
  • MONITORING OF MEMS MIRROR PROPERTIES
    Publication number: 20200333585
    Abstract: Systems and methods are provided for monitoring properties of a microelectromechanical systems (MEMS) oscillating structure. A system includes a MEMS oscillating structure configured as a non-linear resonator to oscillate about a rotation axis; a driver configured to generate a driving force for driving the MEMS oscillating structure about the rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, the driver further configured to decrease the driving force when the MEMS oscillating structure is at a predefined tilt angle to induce an oscillation decay of the MEMS oscillating structure; a measurement circuit configured to measure an oscillation frequency and a tilt angle amplitude of the MEMS oscillating structure during a decay period; and processing circuitry configured to determine at least one characteristic of the MEMS oscillating structure based on at least one of the measured oscillation frequency and the measured tilt angle amplitude.
    Type: Application
    Filed: July 2, 2020
    Publication date: October 22, 2020
    Applicant: Infineon Technologies AG
    Inventors: Hendrikus VAN LIEROP, Alexander HULSKER, Jaap VERHEGGEN
  • Monitoring of MEMS mirror properties
    Patent number: 10788659
    Abstract: Systems and methods are provided for monitoring properties of a microelectromechanical systems (MEMS) oscillating structure. A system includes a MEMS oscillating structure configured as a non-linear resonator to oscillate about a rotation axis; a driver configured to generate a driving force for driving the MEMS oscillating structure about the rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, the driver further configured to decrease the driving force when the MEMS oscillating structure is at a predefined tilt angle to induce an oscillation decay of the MEMS oscillating structure; a measurement circuit configured to measure an oscillation frequency and a tilt angle amplitude of the MEMS oscillating structure during a decay period; and processing circuitry configured to determine at least one characteristic of the MEMS oscillating structure based on at least one of the measured oscillation frequency and the measured tilt angle amplitude.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: September 29, 2020
    Assignee: Infinean Technologies AG
    Inventors: Hendrikus Van Lierop, Alexander Hulsker, Jaap Verheggen
  • MONITORING OF MEMS MIRROR PROPERTIES
    Publication number: 20200132981
    Abstract: Systems and methods are provided for monitoring properties of a microelectromechanical systems (MEMS) oscillating structure. A system includes a MEMS oscillating structure configured as a non-linear resonator to oscillate about a rotation axis; a driver configured to generate a driving force for driving the MEMS oscillating structure about the rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, the driver further configured to decrease the driving force when the MEMS oscillating structure is at a predefined tilt angle to induce an oscillation decay of the MEMS oscillating structure; a measurement circuit configured to measure an oscillation frequency and a tilt angle amplitude of the MEMS oscillating structure during a decay period; and processing circuitry configured to determine at least one characteristic of the MEMS oscillating structure based on at least one of the measured oscillation frequency and the measured tilt angle amplitude.
    Type: Application
    Filed: November 30, 2018
    Publication date: April 30, 2020
    Applicant: Infineon Technologies AG
    Inventors: Hendrikus VAN LIEROP, Alexander HULSKER, Jaap VERHEGGEN