Patents by Inventor Alexander Marxer

Alexander Marxer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma treatment apparatus and method for operating same
    Patent number: 6673255
    Abstract: An apparatus for plasma treating workpieces in vacuum comprises a stack of plasma chambers (20). Handling of workpieces to and from the plasma chambers of the stack is performed in parallelism by one handling device and through lateral handling openings of the plasma chambers. The handling device is rotatable around an axis parallel to the handling openings of the plasma chambers and comprises transport means simultaneously movable radially with respect to the axis of rotation towards and from the handling openings.
    Type: Grant
    Filed: August 10, 2001
    Date of Patent: January 6, 2004
    Assignee: Unaxis Balzers Aktiengesellschaft
    Inventors: Alexander Marxer, Andreas Meyerhans, Fredy Zuend
  • Plasma treatment apparatus and method for operating same
    Publication number: 20020026984
    Abstract: An apparatus for plasma treating workpieces in vacuum comprises a stack of plasma chambers (20) . Handling of workpieces to and from the plasma chambers of the stack is performed in parallelism by one handling device and through lateral handling openings of the plasma chambers. The handling device is rotatable around an axis parallel to the handling openings of the plasma chambers and comprises transport means simultaneously movable radially with respect to the axis of rotation towards and from the handling openings.
    Type: Application
    Filed: August 10, 2001
    Publication date: March 7, 2002
    Applicant: UNAXIS BALZERS AKTIENGESELLSCHAFT.
    Inventors: Alexander Marxer, Andreas Meyerhans, Fredy Zuend
  • Plasma treatment apparatus and method for operation same
    Patent number: 6296735
    Abstract: An apparatus for plasma treating workpieces in vacuum comprises a stack of plasma chambers (20). Handling of workpieces to and from the plasma chambers of the stack is performed in parellelism by one handling device and through lateral handling openings of the plasma chambers. The handling device is rotatable around an axis parallel to the handling openings of the plasma chambers and comprises transport means simultaneously movable radially with respect to the axis of rotation towards and from the handling openings.
    Type: Grant
    Filed: October 23, 1998
    Date of Patent: October 2, 2001
    Assignee: Unaxis Balzers Aktiengesellschaft
    Inventors: Alexander Marxer, Andreas Meyerhans, Fredy Zuend