Patents by Inventor Alexander Michaeli

Alexander Michaeli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature sacrificial oxide formation
    Patent number: 6309983
    Abstract: A method for depositing a sacrificial oxide for fabricating a semiconductor device includes preparing p-doped silicon regions on a semiconductor wafer for depositing a sacrificial oxide on the p-doped silicon regions. The method also includes the step of placing the wafer in an electrochemical cell such that a solution including electrolytes interacts with the p-doped silicon regions to form a sacrificial oxide on the p-doped silicon regions when a potential difference is provided between the wafer and the solution. Processing the wafer using the sacrificial oxide layer is also included.
    Type: Grant
    Filed: June 3, 1999
    Date of Patent: October 30, 2001
    Assignee: Infineon Technologies AG
    Inventors: Alexander Michaeli, Stephan Kudelka