Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.

Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus.

Abstract: A scanning probe microscope combined with a device for acting on a probe and a specimen relates to measurement technology, more specifically to devices for measuring objects by probe methods after nano-sectioning. Same can be used for studying the structures of biological and polymeric specimens under low-temperature conditions. The aim of the invention is to raise the operating efficiency of elements of the measurement unit of a scanning probe microscope which is combined with a device for acting on a probe and a specimen. The technical result of the invention consists in raising the resolution of the device and the quality of the image, as well as expanding the functional capabilities of the device by examining a broader range of specimens.

Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.

Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus.

Abstract: A scanning probe microscope combined with a device for acting on a probe and a specimen relates to measurement technology, more specifically to devices for measuring objects by probe methods after nano-sectioning. Same can be used for studying the structures of biological and polymeric specimens under low-temperature conditions. The aim of the invention is to raise the operating efficiency of elements of the measurement unit of a scanning probe microscope which is combined with a device for acting on a probe and a specimen.