Patents by Inventor Alexander Ostendorf

Alexander Ostendorf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS
    Publication number: 20240085800
    Abstract: A component for a projection exposure apparatus for semiconductor lithography, comprises an optical element and an actuator, which are force-fittingly connected to each other. The actuator at least locally deforms the optical element. The actuator can be configured to minimize the loss in rigidity at the peripheries delimiting the actuator on the imaging quality. A method for designing a component of projection exposure apparatus is provided.
    Type: Application
    Filed: November 13, 2023
    Publication date: March 14, 2024
    Inventors: Thilo Pollak, Dietmar Duerr, Irina Schrezenmeier, Joerg Tschischgale, Matthias Manger, Andreas Beljakov, Stefan Baueregger, Alexander Ostendorf, Dieter Bader, Markus Raab, Bastian Keller
  • METHOD AND SWAPPING TOOL
    Publication number: 20230400772
    Abstract: A method for swapping an optical system, such as a DUV mirror, of a projection exposure apparatus, comprises: a) raising the optical system along a centre axis of the optical system so that mount struts of the optical system pass out of contact with frame struts of a frame carrying the optical system; b) rotating the optical system about the centre axis so that the mount struts are arranged between the frame struts; c) lowering the optical system along the centre axis; and d) shifting the optical system perpendicularly to the centre axis so that the optical system is moved out of a housing.
    Type: Application
    Filed: June 9, 2023
    Publication date: December 14, 2023
    Inventors: Eugen Doetzel, Johannes Kruis, Benjamin Sigel, Dietmar Duerr, Tobias Hegele, Alexander Ostendorf, Sebastian Henseler, Christian Beyrle, Christian Werner, Alexander Kaniut
  • Sealing device, component and lithography apparatus
    Patent number: 11740562
    Abstract: A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: August 29, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Dieter Bader, Alexander Ostendorf, Ole Fluegge
  • SEALING DEVICE, COMPONENT AND LITHOGRAPHY APPARATUS
    Publication number: 20220019150
    Abstract: A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.
    Type: Application
    Filed: September 30, 2021
    Publication date: January 20, 2022
    Inventors: Dieter Bader, Alexander Ostendorf, Ole Fluegge