Patents by Inventor Alexander Pasadyn

Alexander Pasadyn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adaptive sampling method for improved control in semiconductor manufacturing
    Publication number: 20050221514
    Abstract: A method is provided, the method comprising sampling at least one parameter characteristic of processing performed on a workpiece in at least one processing step, and modeling the at least one characteristic parameter sampled using an adaptive sampling processing model, treating sampling as an integrated part of a dynamic control environment, varying the sampling based upon at least one of situational information, upstream events and requirements of run-to-run controllers. The method also comprises applying the adaptive sampling processing model to modify the processing performed in the at least one processing step.
    Type: Application
    Filed: March 8, 2005
    Publication date: October 6, 2005
    Inventors: Alexander Pasadyn, Anthony Toprac, Michael Miller