Patents by Inventor Alexander Pascal DIJKSHOORN

Alexander Pascal DIJKSHOORN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator
    Patent number: 11467504
    Abstract: The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: October 11, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Bas Jansen, Hans Butler, Alexander Pascal Dijkshoorn
  • PIEZOELECTRIC ACTUATOR, ACTUATOR SYSTEM, SUBSTRATE SUPPORT, AND LITHOGRAPHIC APPARATUS INCLUDING THE ACTUATOR
    Publication number: 20210318624
    Abstract: The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.
    Type: Application
    Filed: July 15, 2019
    Publication date: October 14, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Bas JANSEN, Hans BUTLER, Alexander Pascal DIJKSHOORN