Patents by Inventor Alexander Petraschenko

Alexander Petraschenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing a perforated mask for particle radiation
    Patent number: 6773854
    Abstract: A method for producing a perforated mask for particle radiation includes calculating values of an elasticity of adjacent cells of a mask with respect to longitudinal and shear stresses in a main plane of the mask on a model of the desired pattern of mask openings. For the respective individual cells, length and direction of all the edge sections of the openings and cross-sectional areas of the openings are determined. Therefrom, statistical parameters are derived, which are used as a variable in preselected empirical functions to determine the elasticity values of the cells analytically. By linking the elasticity values determined with deformation forces to be expected, the vector field of a distortion of the mask to be expected is calculated by FE calculation. For cutting the mask openings into a blank, a pattern is selected that represents the desired pattern with a distortion being the inverse of the previously calculated distortion.
    Type: Grant
    Filed: July 31, 2002
    Date of Patent: August 10, 2004
    Assignee: Infineon Technologies AG
    Inventors: Albrecht Ehrmann, Ernst Haugeneder, Frank-Michael Kamm, Alexander Petraschenko, Stefan Schunck
  • Method of producing a perforated mask for particle radiation
    Publication number: 20030059689
    Abstract: A method for producing a perforated mask for particle radiation includes calculating values of an elasticity of adjacent cells of a mask with respect to longitudinal and shear stresses in a main plane of the mask on a model of the desired pattern of mask openings. For the respective individual cells, length and direction of all the edge sections of the openings and cross-sectional areas of the openings are determined. Therefrom, statistical parameters are derived, which are used as a variable in preselected empirical functions to determine the elasticity values of the cells analytically. By linking the elasticity values determined with deformation forces to be expected, the vector field of a distortion of the mask to be expected is calculated by FE calculation. For cutting the mask openings into a blank, a pattern is selected that represents the desired pattern with a distortion being the inverse of the previously calculated distortion.
    Type: Application
    Filed: July 31, 2002
    Publication date: March 27, 2003
    Inventors: Albrecht Ehrmann, Ernst Haugeneder, Frank-Michael Kamm, Alexander Petraschenko, Stefan Schunck