Patents by Inventor Alexander Petrus Josephus VAN LANKVELT

Alexander Petrus Josephus VAN LANKVELT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD
    Publication number: 20230279919
    Abstract: A vibration isolator (10; 210) for supporting a payload and isolating the payload from vibrations has a contact member (12) configured for supporting the payload, at least two pressurized gas compartments (24) arranged offset from each other to support the contact member at different locations, which pressurized gas compartments are connected to each other via a tubing system (54). The tubing system contains at least one restriction (66) at which a cross section of the tubing system is reduced by at least 50%.
    Type: Application
    Filed: March 3, 2023
    Publication date: September 7, 2023
    Inventors: Alexander Petrus Josephus VAN LANKVELT, Michiel VERVOORDELDONK, Pavel KAGAN, Marc Wilhelmus Maria VAN DER WIJST, Galip Tuna TURKBEY, Marco HUISKAMP, Ulrich SCHOENHOFF
  • Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device
    Patent number: 10782620
    Abstract: The invention provides a vibration isolation device configured to support a structure, comprising: an air mount having a base part mounted on a reference structure and a vibration isolated part, and an inverted pendulum device, wherein a lower end of the inverted pendulum device is mounted on the vibration isolated part of the air mount and an upper end of the inverted pendulum device support the structure to be supported, wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.
    Type: Grant
    Filed: November 3, 2016
    Date of Patent: September 22, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander Petrus Josephus Van Lankvelt, Olav Johannes Seijger
  • Vibration isolation system and lithographic apparatus
    Patent number: 10545414
    Abstract: The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.
    Type: Grant
    Filed: October 26, 2016
    Date of Patent: January 28, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Alexander Petrus Josephus Van Lankvelt, Ingmar August Kerp, Richardus Simon Antonius Oostveen, Marco Hendrikus Hermanus Oude Nijhuis, Robertus Mathijs Gerardus Rijs, Olav Johannes Seijger, Alexander Maurice Steenhoek
  • VIBRATION ISOLATION DEVICE, LITHOGRAPHIC APPARATUS AND METHOD TO TUNE A VIBRATION ISOLATION DEVICE
    Publication number: 20180328434
    Abstract: The invention provides a vibration isolation device configured to support a structure, comprising: an air mount having a base part mounted on a reference structure and a vibration isolated part, and an inverted pendulum device, wherein a lower end of the inverted pendulum device is mounted on the vibration isolated part of the air mount and an upper end of the inverted pendulum device support the structure to be supported, wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.
    Type: Application
    Filed: November 3, 2016
    Publication date: November 15, 2018
    Inventors: Alexander Petrus Josephus VAN LANKVELT, Olav Johannes SEIJGER
  • VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS
    Publication number: 20180299783
    Abstract: The invention relates to a vibration isolation system (VIS) comprising:—a base (10);—a coupling element (20) to be coupled to a vibration sensitive object;—a vibration isolator (30-34) arranged between the base and the coupling element;—a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and—one or more separate damping elements to act on convolutions of the bellow,
    Type: Application
    Filed: October 26, 2016
    Publication date: October 18, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Alexander Petrus Josephus VAN LANKVELT, Ingmar August KERP, Richardus Simon Antonius OOSTVEEN, Marco Hendrikus Hermanus OUDE NIJHUIS, Robertus Mathijs Gerardus RIJS, Olav Johannes SEIJGER, Alexander Maurice STEENHOEK