Abstract: Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.

Abstract: Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.

Abstract: Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device.

Abstract: Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device.

Abstract: A device for characterizing a sample includes a measuring instrument for determining a physical characteristic of the sample, and a positioning system for positioning the measuring instrument in relation to the sample. The positioning system includes a localization target, a unit for acquiring and analysing images, and image analysis unit suitable for analysing the image of the portion of the localization target to determine the position and orientation of the optical imaging system in relation to the localization target and a processing unit processing results of image analysis and calibration, suitable for determining an absolute position of the localized measurement point in a referential system linked to the sample, the measuring instrument being positioned to take the measurement at said localized measurement point and the physical characteristic of the sample being determined by the measuring instrument at the localized measurement point.

Abstract: Device for characterizing a sample includes a measuring instrument for determining a physical characteristic of the sample at one point thereof; a positioning system for positioning the measuring instrument relative to the sample, to obtain a measurement at a point localized on the sample. The positioning system includes: a locating target connected to the sample and defining a reference system linked thereto; elements for acquiring and analyzing images, including lighting elements for illuminating the target; an optical imaging system connected to the measuring instrument for acquiring an image of at least one portion of the target; and image analysis elements for analyzing the image to determine the position and orientation of the optical imaging system relative to the target; calibration elements for determining the position of the measuring instrument relative to the optical imaging system; and processing elements for processing the results of the image analysis and of the calibration.

Abstract: Device for characterizing a sample includes a measuring instrument for determining a physical characteristic of the sample at one point thereof; a positioning system for positioning the measuring instrument relative to the sample, to obtain a measurement at a point localized on the sample. The positioning system includes: a locating target connected to the sample and defining a reference system linked thereto; elements for acquiring and analyzing images, including lighting elements for illuminating the target; an optical imaging system connected to the measuring instrument for acquiring an image of at least one portion of the target; and image analysis elements for analyzing the image to determine the position and orientation of the optical imaging system relative to the target; calibration elements for determining the position of the measuring instrument relative to the optical imaging system; and processing elements for processing the results of the image analysis and of the calibration.