Abstract: Medical scanner application platforms and associated components (e.g., using a computerized tool) is enabled. For example, a system, can comprise: a processor, and a memory that stores executable instructions that, when executed by the processor, facilitate performance of operations, comprising: determining, based on package schema data representative of a package schema of an application received via a network, one or more attributes of the application, based on the one or more attributes of the application, determining one or more constraints of the application applicable to a medical scanner communicatively coupled to the system via an agent of the medical scanner, and storing the application in an application database accessible to the agent of the medical scanner.

Abstract: In a first aspect, a first apparatus is provided for a chemical mechanical polishing (CMP) process. The first apparatus includes (1) a rotatable member; (2) an end effector adapted to receive and retain a conditioning disk; and (3) an elastic device disposed between the rotatable member and the end effector. The elastic device is (a) adapted to rotate the end effector via a torque from the rotatable member, and (b) flexibly extensible so as to impart a force to the end effector while permitting the end effector to deviate from a perpendicular alignment with the rotatable member in order for a conditioning surface of the conditioning disk to conform to an irregular polishing surface of a pad being conditioned. Numerous other aspects are provided, including methods and apparatus for using liquid or gas to deter polishing slurry or debris from entering the conditioning head.

Abstract: A polishing fluid delivery apparatus has been provided that in one embodiment includes a support member, a dispense arm, a polishing fluid delivery tube and a variable restricting device. The dispense arm extends from an upper portion of the support member and has an outlet of the delivery tube coupled thereto. The restricting device interfaces with the delivery tube and is adapted to provide a variable restriction to flow passing through the delivery tube. In another embodiment, the restricting device is a pinch valve and the tube in continuous from the outlet to beyond a portion that interfaces with the pinch valve. In yet another embodiment, the position of the dispense arm is controllable.

Abstract: A polishing fluid delivery apparatus has been provided that in one embodiment includes a support member, a dispense arm, a polishing fluid delivery tube and a variable restricting device. The dispense arm extends from an upper portion of the support member and has an outlet of the delivery tube coupled thereto. The restricting device interfaces with the delivery tube and is adapted to provide a variable restriction to flow passing through the delivery tube. In another embodiment, the restricting device is a pinch valve and the tube in continuous from the outlet to beyond a portion that interfaces with the pinch valve. In yet another embodiment, the position of the dispense arm is controllable.

Abstract: A polishing fluid delivery apparatus has been provided that in one embodiment includes a support member, a dispense arm, a polishing fluid delivery tube and a variable restricting device. The dispense arm extends from an upper portion of the support member and has an outlet of the delivery tube coupled thereto. The restricting device interfaces with the delivery tube and is adapted to provide a variable restriction to flow passing through the delivery tube. In another embodiment, the restricting device is a pinch valve and the tube in continuous from the outlet to beyond a portion that interfaces with the pinch valve. In yet another embodiment, the position of the delivery arm is controllable.

Abstract: In a first aspect, a first apparatus is provided for a chemical mechanical polishing (CMP) process. The first apparatus includes (1) a rotatable member; (2) an end effector adapted to receive and retain a conditioning disk; and (3) an elastic device disposed between the rotatable member and the end effector. The elastic device is (a) adapted to rotate the end effector via a torque from the rotatable member, and (b) flexibly extensible so as to impart a force to the end effector while permitting the end effector to deviate from a perpendicular alignment with the rotatable member in order for a conditioning surface of the conditioning disk to conform to an irregular polishing surface of a pad being conditioned. Numerous other aspects are provided, including methods and apparatus for using liquid or gas to deter polishing slurry or debris from entering the conditioning head.

Abstract: A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

Abstract: A mechanism for feedthrough of rotary motion to a sealed chamber includes a shaft (220) rotatingly supported inside a hollow housing (200). The shaft (220) comprises a front portion (222), a middle portion (224), and a rear portion (226). The front portion (222) of the shaft protrudes into a sealed external vacuum chamber (202), which is attached to the housing (200). The rear portion (226) of the shaft (220) is eccentric with respect to the rotational axis of the shaft. A cylindrical end (244) of the shaft rotatingly supports a cap (252), which is coaxial with the shaft end (244). The housing (200) and the cap (252) are sealingly and movably connected by a bellows (246). A compensator (250), eccentric with respect to the cap (252) is rotatingly mounted at the periphery of the cap and is fitted into a cavity within an eccentric driver (248), the rotational axis of which is concentric with that of the shaft ( 220).

Abstract: An antifriction linear ball bearing assembly comprises a trihedral cassette (10) with flats (24, 26, and 28), and a central opening for rigidly holding a cylindrical shaft. The cassette (10) has flats which each contain a closed raceway circuit (36) having an elliptical shape. The raceway circuit is filled with bearing balls (14), kept within their track by a ball retainer (12). When the bearing assembly and the shaft, mounted into it, are translated inside an outer sleeve, the bearing balls (14) circulate within the raceway circuits, thus allowing smooth longitudinal movement of the shaft and ensuring uniform wear of the contact surfaces. The linear ball bearing assembly can be applied to mechanisms, such as a motion transmitting device or a feedthrough apparatus, where a shaft supported by antifriction bearings must longitudinally translate inside a hollow outer housing.

Abstract: A device for positioning objects within a sealed vacuum chamber (112) comprises a stationay housing (114), which is sealingly attached to the vacuum chamber (112). Located within the housing (114) is a tubular body (158) capable of rotating and translating within the stationary housing (114) through the interaction of an outer magnet (116), which slides and rotates on the surface of the stationary housing, and an inner magnet (118), which is attached to the tubular body (158). A shaft (198) is located inside the tubular body, but cannot be shifted axially with respect to this body. The front end of shaft (198) extends into the vacuum chamber (112) and may carry a specimen or any other object to be treated or tested in the vacuum chamber. The shaft (198) is driven from an external drive mechanism (124). Rotation of the shaft can be converted into opening and closing movements of the jaws (218 and 220).