Patents by Inventor Alexander Schwartzfurtner

Alexander Schwartzfurtner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for wet treatment of disc-like articles
    Patent number: 8821681
    Abstract: Disclosed is an apparatus for wet treatment of a disc-like article, which comprises: a spin chuck for holding and rotating the disc-like article, and an inner edge nozzle dispensing treatment liquid directed towards a first peripheral region of the first surface of the disc-like article, wherein the first surface is facing the spin chuck and the first peripheral region is defined as being a region of the first surface with an inner radius (ri), which is greater than 1 cm less than the disc-like article's radius (ra), wherein the inner edge nozzle is positioned in a stationary manner between the disc-like article (when placed on the spin chuck) and the spin chuck, wherein the inner edge nozzle is feed through a central pipe, which is disposed in a stationary manner and penetrates centrally through the spin chuck, for supplying a treatment liquid against a first surface of the disc-like article.
    Type: Grant
    Filed: July 3, 2008
    Date of Patent: September 2, 2014
    Assignee: Lam Research AG
    Inventors: Michael Puggl, Alexander Schwartzfurtner, Dieter Frank
  • APPARATUS AND METHOD FOR WET TREATMENT OF DISC-LIKE ARTICLES
    Publication number: 20100200163
    Abstract: Disclosed is an apparatus for wet treatment of a disc-like article, which comprises: a spin chuck for holding and rotating the disc-like article, and an inner edge nozzle dispensing treatment liquid directed towards a first peripheral region of the first surface of the disc-like article, wherein the first surface is facing the spin chuck and the first peripheral region is defined as being a region of the first surface with an inner radius (ri), which is greater than 1 cm less than the disc-like article's radius (ra), wherein the inner edge nozzle is positioned in a stationary manner between the disc-like article (when placed on the spin chuck) and the spin chuck, wherein the inner edge nozzle is feed through a central pipe, which is disposed in a stationary manner and penetrates centrally through the spin chuck, for supplying a treatment liquid against a first surface of the disc-like article.
    Type: Application
    Filed: July 3, 2008
    Publication date: August 12, 2010
    Applicant: LAM RESEARCH AG
    Inventors: Michael Puggi, Alexander Schwartzfurtner, Dieter Frank