Abstract: A method for improving the uniformity of a lithographic process. In one aspect, the probability density function of a first and second lithographic apparatus are matched by providing a continuous z-motion to a stage in the first lithographic apparatus during substrate exposure. Preferably, the z-motion is characterized by a normally distributed function, wherein the effective probability density function of the first apparatus is substantially similar to the probability density function of the second apparatus.

Abstract: A method for improving the uniformity of a lithographic process. In one aspect, the probability density function of a first and second lithographic apparatus are matched by providing a continuous z-motion to a stage in the first lithographic apparatus during substrate exposure. Preferably, the z-motion is characterized by a normally distributed function, wherein the effective probability density function of the first apparatus is substantially similar to the probability density function of the second apparatus.

Abstract: The invention relates to the composition of nitrogen-potash fertilisers containing carbamide and a potassium-containing component and to the method for the production thereof, and can be used for agriculture and the chemical industry. The inventive nitrogen-potash fertiliser contains carbamide and a potassium-containing component. Said potassium-containing component is embodied in the form of a mixture of potassium sulphate and potassium chloride at the following component ratio: 12-43 mass % of (NH2)2CO in terms of N and 3-40 mass % of a K2SO4 and KCl mixture in terms of K2O. The inventive method for producing a nitrogen-potash fertiliser consists in mixing carbamide in the form of a solution with the mixture of sulphate and potassium chloride. Said invention makes it possible to improve the physico-mechanical and agrochemical properties of the nitrogen-potash fertiliser and extend the range of agricultural crops for the efficient use thereof.

Abstract: The invention relates to the production of liquid nitrogen-potash fertilisers and can be used for chemical industry and agriculture. The inventive fertiliser comprises a nitrogen-containing component, a potassium-containing component and water. The nitrogen-containing component contains ammonium nitrate, carbamide and ammonium hydroxide, the potassium-containing component containing potassium chloride and potassium carbonate at the following component ratio: 22-30 mass % of NH4NO3, (NH2)2CO, and NH4OH in terms of N, 3-20 mass % of KCl and/or K2CO3 in terms of K2O3, the rest being H2O. The ammonium nitrate content in said component is selected within a range between 40% and 59.5%. The carbamide content is selected within a range between 30% and 5%, the rest being ammonium hydroxide. The potassium chloride in the potassium-containing component is selected within a range between 0.5% and 26.5%, the rest being potassium carbonate.

Abstract: The invention relates to the production of nitrogen-potassium fertilizers and can be used for the chemical industry and for agriculture. The inventive liquid nitrogen-potassium fertilizer comprises carbamide, potassium chloride, an ammoniated component and water. Ammonium nitrate is used as the ammoniated component with the following mixing ratio of ingredients in: 20-34 mass % carbamide, 5-25 mass % potassium chloride, 25-42 mass % ammonium nitrate, the rest being water. Said liquid nitrogen-potassium fertilizer also comprises 0.3-3 mass % magnesium sulphate or 1.5-3 mass % clay.